Specification

Generic

Supply voltage

100 - 240

V

Technical downloads

Name

Type

Date

File

Size

Software library LabVIEW, C, C# SFC5xxx/SFM5xxx

Software

03/2022

ZIP

1.7 MB

Mass Flow Controllers brochure

Flyer

11/2022

PDF

582.5 KB

Software SFC5xxx/SFM5xxx

Viewer software

04/2022

ZIP

1.1 MB

Quick start guide SFC5xxx/SFM5xxx

User guide

09/2021

PDF

669.9 KB

Software manual SFC5xxx/SFM5xxx

User guide

03/2022

PDF

1.3 MB

Selection guide mass flow controllers

Application note

07/2022

PDF

255.6 KB

REACH and RoHS declaration SFC

Certificate

07/2022

PDF

95.0 KB

SFC5300

MFC for cost-sensitive OEM projects with high unit quantities

SFC5330

Small MFC for cost-sensitive OEM projects with high unit quantities

SFC5400

Versatile mass flow controller

SFC5460

Versatile MFC for OEM projects with high unit quantities

SFC5500-0.5slm

Versatile mass flow controller, via online distribution, 0.5 slm

SFC5500-10slm

Versatile mass flow controller, via online distribution, 10 slm

SFC5500-200slm

Versatile mass flow controller, via online distribution, 200 slm

SFC5500-2slm

Versatile mass flow controller, via online distribution, 2 slm

SFC5500-50sccm

Versatile mass flow controller, via online distribution, 50sccm

SFM5300

High-precision, configurable, fast, digital flow sensor for OEM

SFM5330

High-precision, configurable, fast, digital flow sensor for OEM

SFM5400

High-precision, configurable, fast, multi-gas flow sensor

SFM5460

High-precision, configurable, fast, gas flow sensor for OEM

SFM5500-0.5slm

High-pressure mass flow meter for multiple gases, 0.5 slm

SFM5500-50sccm

High-pressure mass flow meter for multiple gases, 50 sccm

Evaluation of SFC5xxx mass flow controllers and SFM5xxx mass flow meters

Includes:
- 1x RS485-to-USB adapter
- 1x 100/240 V AC adapter (for sockets worldwide)
- 1x USB stick with PC software
- Quick start guide

Sensor is sold separately

Product impressions

SFC6000

Best price-performance ratio

SFC5460

Versatile MFC for OEM projects with high unit quantities

SFC5500-2slm

Versatile mass flow controller, via online distribution, 2 slm

SFC5500-50sccm

Versatile mass flow controller, via online distribution, 50sccm

SFC5330

Small MFC for cost-sensitive OEM projects with high unit quantities

SFC5300

MFC for cost-sensitive OEM projects with high unit quantities

SFC5400

Versatile mass flow controller

SFC5500-200slm

Versatile mass flow controller, via online distribution, 200 slm

SFC5500-10slm

Versatile mass flow controller, via online distribution, 10 slm

SFC5500-0.5slm

Versatile mass flow controller, via online distribution, 0.5 slm

Sensirion’s sensor solutions are used in a wide range of applications and markets. Our reliable environmental and flow sensors improve energy efficiency, increase health and ensure safety and comfort.