EK-F5x

Evaluation kit for Evaluation kit EK-F5x for SFC5xxx, SFM5xxx, SFC6xxx and SFM6xxx

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Specification

Generic
Supply voltage
100 - 240
100 - 240 V

Technical downloads

Name Type Date File Size
Software library LabVIEW, C, C# SFC5xxx/SFM5xxx

03/2022

File

1.7 MB

Software 03/2022 ZIP 1.7 MB
Mass flow controllers brochure

11/2023

File

868.7 KB

Flyer 11/2023 PDF 868.7 KB
Software SFC5xxx/SFM5xxx

04/2022

File

1.1 MB

Viewer software 04/2022 ZIP 1.1 MB
Datasheet SFC6000D/SFM6000D

05/2023

File

1.4 MB

Datasheet 05/2023 PDF 1.4 MB
SHDLC Interface Reference SFC6xxx and SFM6xxx RS485

05/2023

File

842.0 KB

Application note 05/2023 PDF 842.0 KB
Quick start guide SFC5xxx/SFM5xxx

09/2021

File

369.3 KB

User guide 09/2021 PDF 369.3 KB
Quick start guide SFC/SFM6000 evaluation kit

01/2023

File

561.9 KB

User guide 01/2023 PDF 561.9 KB
Software manual SFC5xxx/SFM5xxx

03/2022

File

1.3 MB

User guide 03/2022 PDF 1.3 MB

Compatible products

Name Description Series Category
SFC5300
 MFC for cost-sensitive OEM projects with high unit quantities SFC5300 Mass flow controllers
SFC5330
 Small MFC for cost-sensitive OEM projects with high unit quantities SFC5300 Mass flow controllers
SFC5400
 Versatile mass flow controller SFC5400 Mass flow controllers
SFC5460
 Versatile MFC for OEM projects with high unit quantities SFC5400 Mass flow controllers
SFC5500-0.5slm
 Versatile mass flow controller, via online distribution, 0.5 slm SFC5500 Mass flow controllers
SFC5500-10slm
 Versatile mass flow controller, via online distribution, 10 slm SFC5500 Mass flow controllers
SFC5500-200slm
 Versatile mass flow controller, via online distribution, 200 slm SFC5500 Mass flow controllers
SFC5500-2slm
 Versatile mass flow controller, via online distribution, 2 slm SFC5500 Mass flow controllers
SFC5500-50sccm
 Versatile mass flow controller, via online distribution, 50sccm SFC5500 Mass flow controllers
SFC6000
 MFC with best price-performance ratio, customizable version SFC6000 Mass flow controllers
SFC6000D-20slm
 Best price-performance ratio, distribution version, 20 slm SFC6000 Mass flow controllers
SFC6000D-50slm
 Best price-performance ratio, distribution version, 50 slm SFC6000 Mass flow controllers
SFC6000D-5slm
 Best price-performance ratio, distribution version, 5 slm SFC6000 Mass flow controllers
SFM5300
 High-precision, configurable, fast, digital flow sensor for OEM SFM5xxx Gas flow sensors
SFM5330
 High-precision, configurable, fast, digital flow sensor for OEM SFM5xxx Gas flow sensors
SFM5400
 High-precision, configurable, fast, multi-gas flow sensor SFM5xxx Gas flow sensors
SFM5460
 High-precision, configurable, fast, gas flow sensor for OEM SFM5xxx Gas flow sensors
SFM5500-0.5slm
 High-pressure mass flow meter for multiple gases, 0.5 slm SFM5xxx Gas flow sensors
SFM5500-50sccm
 High-pressure mass flow meter for multiple gases, 50 sccm SFM5xxx Gas flow sensors
SFM6000
 Best price-performance ratio, customizable version SFM6000 Gas flow sensors
SFM6000D-20slm
 Best price-performance ratio, distribution version, 20 slm SFM6000 Gas flow sensors
SFM6000D-50slm
 Best price-performance ratio, distribution version, 50 slm SFM6000 Gas flow sensors
SFM6000D-5slm
 Best price-performance ratio, distribution version, 5 slm SFM6000 Gas flow sensors

SFC5300

MFC for cost-sensitive OEM projects with high unit quantities

SFC5300

Mass flow controllers

SFC5330

Small MFC for cost-sensitive OEM projects with high unit quantities

SFC5300

Mass flow controllers

SFC5400

Versatile mass flow controller

SFC5400

Mass flow controllers

SFC5460

Versatile MFC for OEM projects with high unit quantities

SFC5400

Mass flow controllers

SFC5500-0.5slm

Versatile mass flow controller, via online distribution, 0.5 slm

SFC5500

Mass flow controllers

SFC5500-10slm

Versatile mass flow controller, via online distribution, 10 slm

SFC5500

Mass flow controllers

SFC5500-200slm

Versatile mass flow controller, via online distribution, 200 slm

SFC5500

Mass flow controllers

SFC5500-2slm

Versatile mass flow controller, via online distribution, 2 slm

SFC5500

Mass flow controllers

SFC5500-50sccm

Versatile mass flow controller, via online distribution, 50sccm

SFC5500

Mass flow controllers

SFC6000

MFC with best price-performance ratio, customizable version

SFC6000

Mass flow controllers

SFC6000D-20slm

Best price-performance ratio, distribution version, 20 slm

SFC6000

Mass flow controllers

SFC6000D-50slm

Best price-performance ratio, distribution version, 50 slm

SFC6000

Mass flow controllers

SFC6000D-5slm

Best price-performance ratio, distribution version, 5 slm

SFC6000

Mass flow controllers

SFM5300

High-precision, configurable, fast, digital flow sensor for OEM

SFM5xxx

Gas flow sensors

SFM5330

High-precision, configurable, fast, digital flow sensor for OEM

SFM5xxx

Gas flow sensors

SFM5400

High-precision, configurable, fast, multi-gas flow sensor

SFM5xxx

Gas flow sensors

SFM5460

High-precision, configurable, fast, gas flow sensor for OEM

SFM5xxx

Gas flow sensors

SFM5500-0.5slm

High-pressure mass flow meter for multiple gases, 0.5 slm

SFM5xxx

Gas flow sensors

SFM5500-50sccm

High-pressure mass flow meter for multiple gases, 50 sccm

SFM5xxx

Gas flow sensors

SFM6000

Best price-performance ratio, customizable version

SFM6000

Gas flow sensors

SFM6000D-20slm

Best price-performance ratio, distribution version, 20 slm

SFM6000

Gas flow sensors

SFM6000D-50slm

Best price-performance ratio, distribution version, 50 slm

SFM6000

Gas flow sensors

SFM6000D-5slm

Best price-performance ratio, distribution version, 5 slm

SFM6000

Gas flow sensors

Smart sensors for your application

Sensirion's sensor solutions are used in a wide range of applications and markets. Our reliable environmental and flow sensors improve energy efficiency, increase health and ensure safety and comfort.