规范
| 质量流量 | |||
|---|---|---|---|
| 满量程流速1, 2, 5 and 10slm | 1, 2, 5 and 10 | slm | |
| 准确度0.2%FS or 2% SP | 0.2%FS or 2% SP | ||
| 最大工作压力10bar | 10 | bar | |
| 校准Air, O2, N2, Ar and CO2flow | Air, O2, N2, Ar and CO2 | flow |
| 质量流量 | |||
|---|---|---|---|
| 满量程流速1, 2, 5 and 10slm | 1, 2, 5 and 10 | slm | |
| 准确度0.2%FS or 2% SP | 0.2%FS or 2% SP | ||
| 最大工作压力10bar | 10 | bar | |
| 校准Air, O2, N2, Ar and CO2flow | Air, O2, N2, Ar and CO2 | flow |
| 流体连接器端口Swagelock, VCO, VCR, Downmount | Swagelock, VCO, VCR, Downmount |
| 通用 | |||
|---|---|---|---|
| 电源电压14 - 26.4V | 14 - 26.4 | V | |
| 平均供应电流50000uA | 50000 | uA | |
| 最大供应电流320000uA | 320000 | uA | |
| 接口Analog voltage | Analog voltage | ||
| 尺寸 (长x宽x高)105 x 38.5 x 90.5mm | 105 x 38.5 x 90.5 | mm |
SFC6000-OEM
SFC6000D-50slm
SFC6000D-20slm
SFC6000D-5slm
