多功能质量流量控制器
| 质量流量 | |||
|---|---|---|---|
| 满量程流速1, 2, 5, 10, 20, 50 and 100slm | 1, 2, 5, 10, 20, 50 and 100 | slm | |
| 满量程流速50, 100, 200 and 500sccm | 50, 100, 200 and 500 | sccm | |
| 准确度0.08% FS or 0.8% SP | 0.08% FS or 0.8% SP | ||
| 最大工作压力5bar | 5 | bar | |
| 校准Air, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6 and C4F8flow | Air, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6 and C4F8 | flow | |
| 流体连接器端口Swagelock, VCO, VCR, Downmount | Swagelock, VCO, VCR, Downmount |
| 通用的 | |||
|---|---|---|---|
| 电源电压14 - 26.4V | 14 - 26.4 | V | |
| 平均供应电流50000uA | 50000 | uA | |
| 最大供应电流320000uA | 320000 | uA | |
| 接口Analog voltage, Analog current, Device net, IO link, RS485 | Analog voltage, Analog current, Device net, IO link, RS485 | ||
| 尺寸 (长x宽x高)101.1 x 24.4 x 91mm |

Sensirion 传感器解决方案用于各种应用和市场。我们可靠的环境和流量传感器可提高能源效率、改善健康、保障安全与舒适。
| mm |