SFC5400返回目录过滤器产品类别质量流量控制器2湿度传感器0温度传感器0NOx & VOC传感器0甲醛传感器0CO2センサー0颗粒物传感器0液体流量传感器0差压传感器0气体计量解决方案0燃气计量解决方案0颗粒物传感器0类传感器2附件0开发板0评估套件0参考设计0产品状态活跃2即将到来0新0不建议用于新设计0最后一次购买0过时的0信号输出RS4852Device net1IO link1Analog voltage1Analog current1I²C0Sensibus0PWM0SDM0UART0RS2320Switch0ModBus0对比 SFC5460Versatile MFC for OEM projects with high unit quantities满量程流速0.05, 0.1, 0.2, 0.5, 1, 2, 5 and 10 slm slm准确度0.08% FS or 0.8% SP校准Air, H2, O2, He, Ar, CO2 and N2 and O2 flow flow最大工作压力5 bar流体连接器端口Swagelok, VCR, VCO, W-Seal, Downmount接口RS485电源电压14 - 26 V尺寸 (长x宽x高)101.1 x 24.4 x 91 mm传感器质量流量控制器对比 SFC5400多功能质量流量控制器满量程流速1, 2, 5, 10, 20, 50 and 100 slm准确度0.08% FS or 0.8% SP校准Air, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6 and C4F8 flow最大工作压力5 bar流体连接器端口Swagelock, VCO, VCR, Downmount接口Analog voltage, Analog current, Device net, IO link, RS485电源电压14 - 26.4 V尺寸 (长x宽x高)101.1 x 24.4 x 91 mm传感器质量流量控制器
