Although measuring higher flow rates with Coriolis mass flow meters or ultrasonic flow meters is very accurate, it is not an option for many applications for two reasons: the technology is costly and takes up a lot of space. The low-cost paddlewheel sensors, on the other hand, are too inaccurate for many requirements and do not provide a calibrated output signal. Users also complain about a lack of process reliability, as the measuring wheel can get jammed in the flow channel. Sensirion now closes the gap with a cost-effective liquid flow sensor for laboratory analysis and industry that accurately measures higher flow rates in the usual Sensirion quality, just 5 cm long and just 7 g in weight.
Thermal limitation overcome by steel membrane
Here, the company relies on its proven mode of operation: A microscopic heating element adds a tiny “heat cloud” to the liquid, which is deformed by the flow. Two highly sensitive microsensors measure the temperature before and after the heating element and record the deformation of the heat cloud, which manifests itself in a temperature difference between the two sensors. The microchip converts the value to a fully calibrated and linearized flow rate and provides it as an output signal. So as not to disturb the flow, and to protect the sensor chip from influences caused by the liquid, Sensirion places the microsensor chip outside the flow channel. The flow rate is thus measured “through the channel wall,” which means that both the heat from the heater and the signals from both temperature sensors pass through the membrane. As a consequence, the thermal properties of the membrane significantly influence the sensor performance.