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SFC6000-OEM

MFC with best price-performance ratio, customizable version

Full scale flow rate
2, 5, 20 and 50 slm
Accuracy
0.2% FS or 2% SP
Calibration
Air, N₂, O₂, N₂O, Ar, CO₂ and other non-aggressive gasses flow
Maximum operating pressure
10 bar
Fluidic connector ports
Push-in 6mm, downmount
Interfaces
Analog voltage, I²C, RS485
Supply voltage
22.8 - 25.2 V
Size (LxWxH)
102 x 45 x 20 mm³
  • Sensor
  • Mass flow controllers

SFC6000D-5slm

Best price-performance ratio, distribution version, 5 slm

Full scale flow rate
5 slm
Accuracy
0.2% FS or 2% SP
Calibration
Air, N₂, O₂, N₂O, Ar and CO₂ flow
Maximum operating pressure
10 bar
Fluidic connector ports
Push-in 6mm, downmount
Interfaces
I²C, RS485
Supply voltage
22.9 - 25.9 V
Size (LxWxH)
102 x 45 x 20 mm³
  • Sensor
  • Mass flow controllers

SFC6000D-50slm

Best price-performance ratio, distribution version, 50 slm

Full scale flow rate
50 slm
Accuracy
0.2% FS or 2% SP
Calibration
Air, N₂, O₂, N₂O and Ar and CO₂ flow
Maximum operating pressure
10 bar
Fluidic connector ports
Push-in 6mm, downmount
Interfaces
I²C, RS485
Supply voltage
22.8 - 25.2 V
Size (LxWxH)
102 x 45 x 20 mm³
  • Sensor
  • Mass flow controllers

SFC6000D-20slm

Best price-performance ratio, distribution version, 20 slm

Full scale flow rate
20 slm
Accuracy
0.2% FS or 2% SP
Calibration
Air, N₂, O₂, N₂O, Ar and CO₂ flow
Maximum operating pressure
10 bar
Fluidic connector ports
Push-in 6mm, downmount
Interfaces
I²C, RS485
Supply voltage
22.8 - 25.2 V
Size (LxWxH)
102 x 45 x 20 mm³
  • Sensor
  • Mass flow controllers

SFC5500-50sccm

Versatile mass flow controller, via online distribution, 50sccm

Full scale flow rate
0.05 slm
Accuracy
0.2%FS or 2% SP
Calibration
Air, O2, N2, Ar, CO2, He, H2, CH4 and N2O flow
Maximum operating pressure
10 bar
Fluidic connector ports
Legris
Interfaces
Device net, RS485
Supply voltage
14 - 26.4 V
Size (LxWxH)
105 x 38.5 x 90.5 mm³
  • Sensor
  • Mass flow controllers

SFC5500-2slm

Versatile mass flow controller, via online distribution, 2 slm

Full scale flow rate
2 slm
Accuracy
0.08% FS or 0.8% SP
Calibration
Air, O2, N2, Ar, CO2, He, H2, CH4 and N2O flow
Maximum operating pressure
8 bar
Fluidic connector ports
Legris
Interfaces
Device net, RS485
Supply voltage
14 - 26.4 V
Size (LxWxH)
105 x 38.5 x 90.5 mm³
  • Sensor
  • Mass flow controllers

SFC5500-200slm

Versatile mass flow controller, via online distribution, 200 slm

Full scale flow rate
200 slm
Accuracy
0.08% FS or 0.8% SP
Calibration
Air, O2 and N2 flow
Maximum operating pressure
5 bar
Fluidic connector ports
Legris
Interfaces
Device net, RS485
Supply voltage
14 - 26.4 V
Size (LxWxH)
135 x 24.6 x 91 mm³
  • Sensor
  • Mass flow controllers

SFC5500-10slm

Versatile mass flow controller, via online distribution, 10 slm

Full scale flow rate
10 slm
Accuracy
0.08% FS or 0.8% SP
Calibration
Air, O2, N2, Ar, CO2, He, H2, CH4 and N2O flow
Maximum operating pressure
5 bar
Fluidic connector ports
Legris
Interfaces
Device net, RS485
Supply voltage
14 - 26.4 V
Size (LxWxH)
115 x 24.6 x 91 mm³
  • Sensor
  • Mass flow controllers

SFC5500-0.5slm

Versatile mass flow controller, via online distribution, 0.5 slm

Full scale flow rate
0.5 slm
Accuracy
0.08% FS or 0.8% SP
Calibration
Air, O2, N2, Ar, CO2, He, H2, CH4 and N2O flow
Maximum operating pressure
5 bar
Fluidic connector ports
Legris
Interfaces
Device net, RS485
Supply voltage
14 - 26.4 V
Size (LxWxH)
115 x 24.6 x 91 mm³
  • Sensor
  • Mass flow controllers

SFC5460

Versatile MFC for OEM projects with high unit quantities

Full scale flow rate
0.05, 0.1, 0.2, 0.5, 1, 2, 5 and 10 slm slm
Accuracy
0.08% FS or 0.8% SP
Calibration
Air, H2, O2, He, Ar, CO2 and N2 and O2 flow flow
Maximum operating pressure
5 bar
Fluidic connector ports
Swagelok, VCR, VCO, W-Seal, Downmount
Interfaces
RS485
Supply voltage
14 - 26 V
Size (LxWxH)
101.1 x 24.4 x 91 mm³
  • Sensor
  • Mass flow controllers

SFC5400

Versatile mass flow controller

Full scale flow rate
1, 2, 5, 10, 20, 50 and 100 slm
Accuracy
0.08% FS or 0.8% SP
Calibration
Air, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6 and C4F8 flow
Maximum operating pressure
5 bar
Fluidic connector ports
Swagelock, VCO, VCR, Downmount
Interfaces
Analog voltage, Analog current, Device net, IO link, RS485
Supply voltage
14 - 26.4 V
Size (LxWxH)
101.1 x 24.4 x 91 mm³
  • Sensor
  • Mass flow controllers

SFC5330

Small MFC for cost-sensitive OEM projects with high unit quantities

Full scale flow rate
1, 2 and 5 slm
Accuracy
0.2%FS or 2% SP
Calibration
Air, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6 and C4F8 flow
Maximum operating pressure
10 bar
Fluidic connector ports
Downmount
Interfaces
RS485
Supply voltage
14 - 26.4 V
Size (LxWxH)
34 x 25 x 62.2 mm³
  • Sensor
  • Mass flow controllers
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