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SFC6000-OEM

MFC with best price-performance ratio, customizable version

Supply voltage
22.8 - 25.2 V
Accuracy
0.2% FS or 2% SP
Full scale flow rate
2, 5, 20 and 50 slm
Full scale flow rate
500 sccm
Size (LxWxH)
102 x 45 x 20 mm³
  • Sensor
  • Mass flow controllers

SFC6000D-5slm

Best price-performance ratio, distribution version, 5 slm

Supply voltage
22.9 - 25.9 V
Accuracy
0.2% FS or 2% SP
Full scale flow rate
5 slm
Full scale flow rate
5000 sccm
Size (LxWxH)
102 x 45 x 20 mm³
  • Sensor
  • Mass flow controllers

SFC6000D-50slm

Best price-performance ratio, distribution version, 50 slm

Supply voltage
22.8 - 25.2 V
Accuracy
0.2% FS or 2% SP
Full scale flow rate
50 slm
Full scale flow rate
50000 sccm
Size (LxWxH)
102 x 45 x 20 mm³
  • Sensor
  • Mass flow controllers

SFC6000D-20slm

Best price-performance ratio, distribution version, 20 slm

Supply voltage
22.8 - 25.2 V
Accuracy
0.2% FS or 2% SP
Full scale flow rate
20 slm
Full scale flow rate
20000 sccm
Size (LxWxH)
102 x 45 x 20 mm³
  • Sensor
  • Mass flow controllers

SFC5500-50sccm

Versatile mass flow controller, via online distribution, 50sccm

Supply voltage
14 - 26.4 V
Accuracy
0.2%FS or 2% SP
Full scale flow rate
0.05 slm
Full scale flow rate
50 sccm
Size (LxWxH)
105 x 38.5 x 90.5 mm³
  • Sensor
  • Mass flow controllers

SFC5500-2slm

Versatile mass flow controller, via online distribution, 2 slm

Supply voltage
14 - 26.4 V
Accuracy
0.08% FS or 0.8% SP
Full scale flow rate
2 slm
Full scale flow rate
2000 sccm
Size (LxWxH)
105 x 38.5 x 90.5 mm³
  • Sensor
  • Mass flow controllers

SFC5500-200slm

Versatile mass flow controller, via online distribution, 200 slm

Supply voltage
14 - 26.4 V
Accuracy
0.08% FS or 0.8% SP
Full scale flow rate
200 slm
Full scale flow rate
200000 sccm
Size (LxWxH)
135 x 24.6 x 91 mm³
  • Sensor
  • Mass flow controllers

SFC5500-10slm

Versatile mass flow controller, via online distribution, 10 slm

Supply voltage
14 - 26.4 V
Accuracy
0.08% FS or 0.8% SP
Full scale flow rate
10 slm
Full scale flow rate
10000 sccm
Size (LxWxH)
115 x 24.6 x 91 mm³
  • Sensor
  • Mass flow controllers

SFC5500-0.5slm

Versatile mass flow controller, via online distribution, 0.5 slm

Supply voltage
14 - 26.4 V
Accuracy
0.08% FS or 0.8% SP
Full scale flow rate
0.5 slm
Full scale flow rate
500 sccm
Size (LxWxH)
115 x 24.6 x 91 mm³
  • Sensor
  • Mass flow controllers

SFC5460

Versatile MFC for OEM projects with high unit quantities

Supply voltage
14 - 26 V
Accuracy
0.08% FS or 0.8% SP
Full scale flow rate
0.05, 0.1, 0.2, 0.5, 1, 2, 5 and 10 slm slm
Full scale flow rate
20 and 50 and 100 sccm sccm
Size (LxWxH)
101.1 x 24.4 x 91 mm³
  • Sensor
  • Mass flow controllers

SFC5400

Versatile mass flow controller

Supply voltage
14 - 26.4 V
Accuracy
0.08% FS or 0.8% SP
Full scale flow rate
1, 2, 5, 10, 20, 50 and 100 slm
Full scale flow rate
50, 100, 200 and 500 sccm
Size (LxWxH)
101.1 x 24.4 x 91 mm³
  • Sensor
  • Mass flow controllers

SFC5330

Small MFC for cost-sensitive OEM projects with high unit quantities

Supply voltage
14 - 26.4 V
Accuracy
0.2%FS or 2% SP
Full scale flow rate
1, 2 and 5 slm
Full scale flow rate
50, 100, 200 and 500 sccm
Size (LxWxH)
34 x 25 x 62.2 mm³
  • Sensor
  • Mass flow controllers
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