Product catalog

SFC5500-50sccm New

Versatile mass flow controller, via online distribution, 50sccm

Full scale flow rate
0.05 slm
Accuracy
0.2% FS, 0.2% m.v.
Full scale flow rate
50 sccm
Package size (LxWxH)
105 x 38.5 x 90.5 mm³
Sensor Mass flow controllers

SFC5500-2slm New

Versatile mass flow controller, via online distribution, 2 slm

Full scale flow rate
2 slm
Accuracy
0.08% FS or 0.8% m.v
Full scale flow rate
2000 sccm
Package size (LxWxH)
105 x 38.5 x 90.5 mm³
Sensor Mass flow controllers

SFC5500-200slm

Versatile mass flow controller, via online distribution, 200 slm

Full scale flow rate
200 slm
Accuracy
0.08% FS or 0.8% m.v
Full scale flow rate
200000 sccm
Package size (LxWxH)
135 x 24.6 x 91 mm³
Sensor Mass flow controllers

SFC5500-10slm

Versatile mass flow controller, via online distribution, 10 slm

Full scale flow rate
10 slm
Accuracy
0.08% FS or 0.8% m.v
Full scale flow rate
10000 sccm
Package size (LxWxH)
115 x 24.6 x 91 mm³
Sensor Mass flow controllers

SFC5500-0.5slm

Versatile mass flow controller, via online distribution, 0.5 slm

Full scale flow rate
0.5 slm
Accuracy
0.08% FS or 0.8% m.v
Full scale flow rate
500 sccm
Package size (LxWxH)
115 x 24.6 x 91 mm³
Sensor Mass flow controllers

SFC5400

Versatile mass flow controller

Full scale flow rate
1, 2, 5, 10, 20, 50 and 100 slm
Accuracy
0.08% FS or 0.8% m.v
Full scale flow rate
50, 100, 200 and 500 sccm
Package size (LxWxH)
101.1 x 24.4 x 91 mm³
Sensor Mass flow controllers

SFC5330

Small MFC for cost-sensitive OEM projects with high unit quantities

Full scale flow rate
1, 2 and 5 slm
Accuracy
0.2%FS or 2% m.v.
Full scale flow rate
50, 100, 200 and 500 sccm
Package size (LxWxH)
34 x 25 x 62.2 mm³
Sensor Mass flow controllers

SFC5300

MFC for cost-sensitive OEM projects with high unit quantities

Full scale flow rate
1, 2, 5 and 10 slm
Accuracy
0.2%FS or 2% m.v.
Full scale flow rate
50, 100, 200 and 500 sccm
Package size (LxWxH)
48 x 25 x 79.5 mm³
Sensor Mass flow controllers

EK-F5x

Evaluation kit for SFC5xxx and SFM5xxx

Evaluation kit Mass flow controllers

SFC3000 nrnd

Predecessor of the SFC5300 mass flow controller

Accuracy
±0.2sccm ± 2%
Package size (LxWxH)
70 x 25 x 73 mm³
Sensor Mass flow controllers

SFC4000 Obsolete

Predecessor of the SFC5400 mass flow controller

Full scale flow rate
1, 2, 5 and 10 slm
Accuracy
0.2%FS or 2% m.v.
Package size (LxWxH)
105 x 38.5 x 90.5 mm³
Sensor Mass flow controllers
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