SFM5300

High-precision, configurable, fast, digital flow sensor for OEM

Specification

Mass flow
Full scale flow rate
0.05, 0.1, 0.2, 0.5, 1, 2, 5, 10, 20, 50 and 100
slm
Accuracy
0.2%FS or 2% SP
Maximum operating pressure
10
bar
Calibration
Air, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6 and C4F8
flow
Fluidic connector ports
Downmount
Generic
Supply voltage
14 - 26.4
V
Average supply current
50000
uA
Max. supply current
320000
uA
Interfaces
RS485
Package size (LxWxH)
48 x 25 x 79.5
mm³

Technical downloads

Name
Type
Date
File
Size
Datasheet SFC5300/SFM5300 & SFC5330/SFM5330
Datasheet
08/2021
PDF
1.0 MB
Datasheet SFM5300
Datasheet
10/2016
PDF
568.9 KB
Mounting plate SFX53xx
CAD
07/2022
STEP
196.0 KB
STEP file SFM5300
CAD
07/2022
ZIP
5.4 MB
Software SFC5xxx/SFM5xxx
Viewer software
04/2022
ZIP
1.1 MB
Engineering guide SFC5xxx/SFM5xxx
Application note
08/2022
PDF
994.5 KB
Reference and flow conversions
Application note
09/2021
PDF
293.7 KB
Reference and flow conversions calculator
Application note
10/2021
XLSX
30.3 KB
SHDLC Interface Reference SFM5xxx/SFC5xxx
Application note
02/2022
PDF
665.2 KB
Quick start guide SFC5xxx/SFM5xxx
User guide
09/2021
PDF
669.9 KB
Recalibration tool SFC5xxx/SFM5xxx
User guide
07/2022
PDF
1002.3 KB
Software manual SFC5xxx/SFM5xxx
User guide
03/2022
PDF
1.3 MB
Recalibration tool software SFC5xxx/SFM5xxx
Software
06/2022
MSI
1.7 MB
Software library LabVIEW, C, C# SFC5xxx/SFM5xxx
Software
03/2022
ZIP
1.7 MB
Engineering guide SFM
User guide
01/2021
PDF
592.1 KB
REACH and RoHS declaration SFM/SGM
Certificate
07/2022
PDF
99.6 KB
Product flyer SFM
Flyer
08/2021
PDF
1013.9 KB

Buy the following product to evaluate this sensor

The SFM5300 mass flow meter enables the measurement of mass flows with outstanding accuracy (errors < 2%), long-term stability and repeatability. It boasts an impressive dynamic measurement range and a compact size. The SFM5300 mass flow meter is available with downmount connections and digital interfaces. The metal SFM5300 is the smaller variant of the SFM5400 mass flow meter and is exclusively for cost-sensitive OEM projects with high unit quantities.

The outstanding performance of the SFM5300 mass flow meter is based on the innovative CMOSens® Technology, which integrates the high-precision sensor technology and the processing electronics on a single CMOS silicon chip. Combined with high-quality materials, the result is the durably stable, extremely fast and highly precise SFM5300 mass flow meter.

The SFM5300 mass flow meter is the valve-free version of the SFC5300 mass flow controller. The two sensor products have the same performance characteristics and are used in similar applications, meaning they can be ideally combined. You can find further information and detailed specifications about the mass flow controller on the SFC5300 website.

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