SFM5300

High-precision, configurable, fast, digital sensor for OEM

Specification

Mass flow
Full scale flow rate
0.05, 0.1, 0.2, 0.5, 1, 2, 5, 10, 20, 50 and 100
slm
Accuracy
0.2%FS or 2% m.v.
Maximum operating pressure
10
bar
Calibration
Air, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6 and C4F8
flow
Fluidic connector ports
Downmount
Generic
Supply voltage
14 - 26.4
V
Average supply current
50000
μA
Max. supply current
320000
μA
Interfaces
IO link, RS485
Package size (LxWxH)
48 x 25 x 79.5
mm³

Technical downloads

Name
Type
Date
File
Size
Software SFC5xxx/SFM5xxx
Viewer software
04/2022
ZIP
1.1 MB
Datasheet SFM5300
Datasheet
10/2016
PDF
568.9 KB
SHDLC Interface Reference SFM5xxx/SFC5xxx
Application note
02/2022
PDF
665.2 KB
Quick start guide SFC5xxx/SFM5xxx
User guide
09/2021
PDF
669.9 KB
Software manual SFC5xxx/SFM5xxx
User guide
03/2022
PDF
1.3 MB
Sample code LabVIEW C# SFC5xxx/SFM5xxx
Software
03/2022
ZIP
1.7 MB
Reference and flow conversions
Application note
09/2021
PDF
293.7 KB
Reference and flow conversions calculator
Application note
10/2021
XLSX
30.3 KB
Engineering guide SFM
User guide
01/2021
PDF
592.1 KB
REACH and RoHS declaration SFM/SGM
Certificate
09/2021
PDF
99.4 KB
Product flyer SFM
Flyer
08/2021
PDF
1013.9 KB

Buy the following product to evaluate this sensor

The SFM5300 mass flow meter enables the measurement of mass flows with outstanding accuracy (errors < 2%), long-term stability and repeatability. It boasts an impressive dynamic measurement range and a compact size. The SFM5300 mass flow meter is available with downmount connections and digital interfaces. The metal SFM5300 is the smaller variant of the SFM5400 mass flow meter and is exclusively for cost-sensitive OEM projects with high unit quantities.

The outstanding performance of the SFM5300 mass flow meter is based on the innovative CMOSens® Technology, which integrates the high-precision sensor technology and the processing electronics on a single CMOS silicon chip. Combined with high-quality materials, the result is the durably stable, extremely fast and highly precise SFM5300 mass flow meter.

The SFM5300 mass flow meter is the valve-free version of the SFC5300 mass flow controller. The two sensor products have the same performance characteristics and are used in similar applications, meaning they can be ideally combined. You can find further information and detailed specifications about the mass flow controller on the SFC5300 website.

Product impressions

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