Sites & Languages
High-precision, configurable, fast, digital flow sensor for OEM
Specification
Mass flow
Full scale flow rate
0.05, 0.1, 0.2, 0.5, 1, 2, 5, 10, 20, 50 and 100
slm
Accuracy
0.2%FS or 2% SP
Maximum operating pressure
10
bar
Calibration
Air, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6 and C4F8
flow
Fluidic connector ports
Downmount
Generic
Supply voltage
14 - 26.4
V
Average supply current
50000
uA
Max. supply current
320000
uA
Interfaces
RS485
Package size (LxWxH)
48 x 25 x 79.5
mm³
Technical downloads
Name
Type
Date
File
Size