Specification

Gas flow
Full scale flow rate
-24 - 240
-24 - 240 slm
Typical accuracy
±2.5% m.v.
±2.5% m.v.
Calibration
Air and O₂
Air and O₂
Sensor output
Flow and T
Flow and T
Maximum operating pressure
1.07
1.07 bar
Fluidic connector ports
O-ring
O-ring
Generic
Supply voltage
4.75 - 5.25
4.75 - 5.25 V
Max. supply current
150000
150000 uA
Interfaces
Analog voltage
Analog voltage
Size (LxWxH)
57.5 x 27.5 x 29.4
57.5 x 27.5 x 29.4 mm³

Technical downloads

Name Type Date File Size
Datasheet SFM3100

04/2022

File

454.2 KB

Datasheet 04/2022 PDF 454.2 KB
STEP file SFM3100

10/2021

File

8.7 MB

CAD 10/2021 STEP 8.7 MB
SEK-ControlCenter (all devices)

10/2021

Link

-

Viewer software 10/2021 Link -
Handling instructions SFM3xxx

01/2021

File

141.7 KB

Application note 01/2021 PDF 141.7 KB
Reference and flow conversions

09/2021

File

293.7 KB

Application note 09/2021 PDF 293.7 KB
Reference and flow conversions calculator

10/2021

File

30.3 KB

Application note 10/2021 XLSX 30.3 KB
Engineering guide SFM

01/2021

File

592.1 KB

User guide 01/2021 PDF 592.1 KB
Calibration certification gas flow sensors

01/2023

File

169.8 KB

Certificate 01/2023 PDF 169.8 KB
REACH and RoHS declaration SFM/SGM

02/2024

File

88.9 KB

Certificate 02/2024 PDF 88.9 KB
Mass flow controllers brochure chinese

02/2024

File

606.2 KB

Flyer 02/2024 PDF 606.2 KB
Overview of Sensirion gas flow meters

01/2024

File

1013.9 KB

Flyer 01/2024 PDF 1013.9 KB

Smart sensors for your application

Sensirion's sensor solutions are used in a wide range of applications and markets. Our reliable environmental and flow sensors improve energy efficiency, increase health and ensure safety and comfort.