Specification

Gas flow
Full scale flow rate
-10 - 160
-10 - 160 slm
Typical accuracy
±2% m.v.
±2% m.v.
Calibration
Air and O₂
Air and O₂
Sensor output
Flow
Flow
Maximum operating pressure
1.3
1.3 bar
Fluidic connector ports
Medical cone (22 mm)
Medical cone (22 mm)
Generic
Supply voltage
2.7 - 5.5
2.7 - 5.5 V
Average supply current
3800
3800 uA
Max. supply current
5500
5500 uA
Interfaces
Analog voltage
Analog voltage
Size (LxWxH)
82 x 35 x 32
82 x 35 x 32 mm³

Technical downloads

Name Type Date File Size
Datasheet SFM3020

06/2020

File

948.6 KB

Datasheet 06/2020 PDF 948.6 KB
STEP file SFM3003, SFM3019, SFM3020

10/2021

File

3.7 MB

CAD 10/2021 STEP 3.7 MB
SEK-ControlCenter (all devices)

10/2021

Link

-

Viewer software 10/2021 Link -
Handling instructions SFM3xxx

01/2021

File

141.7 KB

Application note 01/2021 PDF 141.7 KB
Reference and flow conversions

09/2021

File

293.7 KB

Application note 09/2021 PDF 293.7 KB
Reference and flow conversions calculator

10/2021

File

30.3 KB

Application note 10/2021 XLSX 30.3 KB
Engineering guide SFM

01/2021

File

592.1 KB

User guide 01/2021 PDF 592.1 KB
Calibration certification gas flow sensors

01/2023

File

169.8 KB

Certificate 01/2023 PDF 169.8 KB
REACH and RoHS declaration SFM/SGM

02/2024

File

88.9 KB

Certificate 02/2024 PDF 88.9 KB
Mass flow controllers brochure chinese

02/2024

File

606.2 KB

Flyer 02/2024 PDF 606.2 KB
Overview of Sensirion gas flow meters

01/2024

File

1013.9 KB

Flyer 01/2024 PDF 1013.9 KB

Smart sensors for your application

Sensirion's sensor solutions are used in a wide range of applications and markets. Our reliable environmental and flow sensors improve energy efficiency, increase health and ensure safety and comfort.