SFM3020

Analog flow sensor for high-volume respiratory devices, 160 slm

Specification

Gas flow
Full scale flow rate
-10 - 160
slm
Typical accuracy
±2% m.v.
Calibration
Air and O₂
Sensor output
Flow
Maximum operating pressure
1.3
bar
Fluidic connector ports
Medical cone (22 mm)
Generic
Supply voltage
2.7 - 5.5
V
Average supply current
3800
μA
Max. supply current
5500
μA
Interfaces
Analog voltage
Package size (LxWxH)
82 x 35 x 32
mm³

Technical downloads

Name
Type
Date
File
Size
Datasheet SFM3020
Datasheet
06/2020
PDF
948.6 KB
STEP file SFM3003, SFM3019, SFM3020
CAD
10/2021
STEP
3.7 MB
Handling instructions SFM3xxx
Application note
01/2021
PDF
141.7 KB
Reference and flow conversions
Application note
09/2021
PDF
293.7 KB
Reference and flow conversions calculator
Application note
10/2021
XLSX
30.3 KB
STEP file SFM3000
CAD
10/2021
STEP
2.2 MB
Product flyer medical applications SFM3000
Flyer
10/2021
PDF
183.1 KB
Engineering guide SFM
User guide
01/2021
PDF
592.1 KB
REACH and RoHS declaration SFM/SGM
Certificate
09/2021
PDF
99.4 KB
Product flyer SFM
Flyer
08/2021
PDF
1013.9 KB

The SFM3020 mass flow meter is the analog sibling of SFM3003 and particularly suitable for high-volume applications. The design of the flow channel results in a very low pressure drop, making it ideal for medical ventilation.

The flow of air and oxygen at rates from -10slm to 160slm is measured with excellent accuracy and extremely high speed. The signal is internally linearized and temperature compensated and provided as an analog output voltage for easy read out.

As part of the SFM3xxx platform, the SFM3020 is a versatile sensor solution for many different high-volume applications in which cost efficiency is the priority and analog the preferred interface. The outstanding performance of the SFM3020 sensor is based on Sensirion's patented CMOSens® Technology, which combines the sensor element, signal processing and digital calibration on a tiny microchip. The gas is measured by a thermal sensor element to provide an extended dynamic range and enhanced long-term stability compared to other flow measuring technologies. Thanks to this proven CMOSens® Technology, the flow meter is perfectly suited for high-quality mass production and is the ideal choice for demanding and cost-sensitive OEM applications.

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