SFM5460

High-precision, configurable, fast, gas flow sensor for OEM

Specification

Mass flow
Full scale flow rate
0.05, 0.1, 0.2, 0.5, 1, 2, 5 and 10 slm
slm
Full scale flow rate
20 and 50 and 100 sccm
sccm
Accuracy
0.08% FS or 0.8% SP
Maximum operating pressure
5
bar
Calibration
Air, H2, O2, He, Ar, CO2 and N2 and O2 flow
flow
Generic
Supply voltage
14 - 26
V
Average supply current
50000
uA
Max. supply current
320000
uA
Interfaces
RS485
Package size (LxWxH)
101.1 x 24.4 x 91
mm³

Technical downloads

Name
Type
Date
File
Size
Datasheet SFC5460/SFM5460
Datasheet
09/2022
PDF
771.0 KB
Mounting Plate SFX54xx
CAD
07/2022
STEP
168.2 KB
STEP file downmount SFC5460/SFM5460
CAD
08/2022
STEP
25.2 MB
STEP file SFM5400
CAD
07/2022
ZIP
3.7 MB
Software SFC5xxx/SFM5xxx
Viewer software
04/2022
ZIP
1.1 MB
Engineering guide SFC5xxx/SFM5xxx
Application note
08/2022
PDF
994.5 KB
Reference and flow conversions
Application note
09/2021
PDF
293.7 KB
Reference and flow conversions calculator
Application note
10/2021
XLSX
30.3 KB
SHDLC Interface Reference SFM5xxx/SFC5xxx
Application note
02/2022
PDF
665.2 KB
Quick start guide SFC5xxx/SFM5xxx
User guide
09/2021
PDF
669.9 KB
Recalibration tool SFC5xxx/SFM5xxx
User guide
07/2022
PDF
1002.3 KB
Software manual SFC5xxx/SFM5xxx
User guide
03/2022
PDF
1.3 MB
Recalibration tool software SFC5xxx/SFM5xxx
Software
06/2022
MSI
1.7 MB
Software library LabVIEW, C, C# SFC5xxx/SFM5xxx
Software
03/2022
ZIP
1.7 MB
Engineering guide SFM
User guide
01/2021
PDF
592.1 KB
REACH and RoHS declaration SFM/SGM
Certificate
07/2022
PDF
99.6 KB
Product flyer SFM
Flyer
08/2021
PDF
1013.9 KB

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