SFM5400

High-precision, configurable, fast, multi-gas flow sensor

Specification

Mass flow
Full scale flow rate
0.05, 0.1, 0.2, 0.5, 1, 2, 5, 10, 20, 50 and 100
slm
Accuracy
0.08% FS or 0.8% SP
Maximum operating pressure
10
bar
Calibration
Air, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6 and C4F8
flow
Fluidic connector ports
Swagelock, VCO, VCR, Downmount
Generic
Supply voltage
14 - 26.4
V
Average supply current
50000
uA
Max. supply current
320000
uA
Interfaces
Analog voltage, Analog current, Device net, IO link, RS485
Package size (LxWxH)
101.1 x 24.4 x 91
mm³

Technical downloads

Name
Type
Date
File
Size
Datasheet SFC5400 / SFM5400
Datasheet
09/2022
PDF
798.5 KB
Datasheet SFM5400
Datasheet
02/2020
PDF
1.0 MB
Mounting Plate SFX54xx
CAD
07/2022
STEP
168.2 KB
STEP file SFC5400
CAD
10/2021
ZIP
3.2 MB
STEP file SFM5400
CAD
07/2022
ZIP
3.7 MB
Software SFC5xxx/SFM5xxx
Viewer software
04/2022
ZIP
1.1 MB
Datasheet SFC5500 / SFM5500
Datasheet
09/2022
PDF
1.0 MB
Compatible fittings SFC5500/SFM5500
Application note
01/2022
None
-
Engineering guide SFC5xxx/SFM5xxx
Application note
08/2022
PDF
994.5 KB
Reference and flow conversions
Application note
09/2021
PDF
293.7 KB
Reference and flow conversions calculator
Application note
10/2021
XLSX
30.3 KB
SHDLC Interface Reference SFM5xxx/SFC5xxx
Application note
02/2022
PDF
665.2 KB
Quick start guide SFC5xxx/SFM5xxx
User guide
09/2021
PDF
669.9 KB
Recalibration tool SFC5xxx/SFM5xxx
User guide
07/2022
PDF
1002.3 KB
Software manual SFC5xxx/SFM5xxx
User guide
03/2022
PDF
1.3 MB
Recalibration tool software SFC5xxx/SFM5xxx
Software
06/2022
MSI
1.7 MB
Software library LabVIEW, C, C# SFC5xxx/SFM5xxx
Software
03/2022
ZIP
1.7 MB
Engineering guide SFM
User guide
01/2021
PDF
592.1 KB
REACH and RoHS declaration SFM/SGM
Certificate
07/2022
PDF
99.6 KB
Product flyer SFM
Flyer
08/2021
PDF
1013.9 KB

Buy the following product to evaluate this sensor

The SFM5400 mass flow meter measures mass flows with outstanding accuracy (errors < 1%), long-term stability and repeatability and covers an impressively wide dynamic measurement range. The SFM5400 is made of metal and highly configurable. It is available with a variety of fluidic connections and various interfaces and measures maximum flow rates between 50 sccm and 100 slm. The sensor signal is directly converted into a digital, completely calibrated and temperature-compensated signal on the chip. Multiple gas calibrations can be stored on a single device. Additionally, the flow meter can check whether the activated gas calibration matches the actual gas present. The SFM5400's versatility makes it the ideal solution for industrial and medical applications.

The outstanding performance of the SFM5400 mass flow meter is based on the innovative CMOSens® Technology, which integrates the high-precision sensor element and the analog and digital processing electronics on a single CMOS silicon chip. Combined with high-quality materials, the result is a durably stable, extremely fast and highly precise mass flow meter.

The SFM5400 mass flow meter is the valve-free version of the SFC5400 mass flow controller. The SFC5400 mass flow controller has the same performance characteristics as the mass flow meter and is used in similar applications, and the two products can be ideally combined. You can find further information and detailed specifications about the mass flow controller on the SFC5400 website.

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