SFM5400

High-precision, configurable, fast, multi-gas sensor

Specification

Mass flow
Full scale flow rate
0.05, 0.1, 0.2, 0.5, 1, 2, 5, 10, 20, 50 and 100
slm
Accuracy
0.08% FS or 0.8% m.v
Maximum operating pressure
10
bar
Calibration
Air, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6 and C4F8
flow
Fluidic connector ports
Swagelock, VCO, VCR, Downmount
Generic
Supply voltage
14 - 26.4
V
Average supply current
50000
μA
Max. supply current
320000
μA
Interfaces
Analog voltage, Analog current, Device net, IO link, RS485
Package size (LxWxH)
101.1 x 24.4 x 91
mm³

Technical downloads

Name
Type
Date
File
Size
Datasheet SFM5400
Datasheet
02/2020
PDF
1.0 MB
Viewer software SFC5xxx/SFM5xxx
Viewer software
10/2021
MSI
1.7 MB
Reference and flow conversions
Application note
09/2021
PDF
614.1 KB
Reference and flow conversions calculator
Application note
10/2021
XLSX
30.3 KB
Quick start guide SFC5xxx/SFM5xxx
User guide
09/2021
PDF
669.9 KB
Engineering guide SFM
User guide
01/2021
PDF
592.1 KB
REACH and RoHS declaration SFM/SGM
Certificate
09/2021
PDF
31.2 KB
Product flyer SFM
Flyer
08/2021
PDF
4.6 MB

Buy the following product to evaluate this sensor

The SFM5400 mass flow meter measures mass flows with outstanding accuracy (errors < 1%), long-term stability and repeatability and covers an impressively wide dynamic measurement range. The SFM5400 is made of metal and highly configurable. It is available with a variety of fluidic connections and various interfaces and measures maximum flow rates between 50 sccm and 100 slm. The sensor signal is directly converted into a digital, completely calibrated and temperature-compensated signal on the chip. Multiple gas calibrations can be stored on a single device. Additionally, the flow meter can check whether the activated gas calibration matches the actual gas present. The SFM5400's versatility makes it the ideal solution for industrial and medical applications.

The outstanding performance of the SFM5400 mass flow meter is based on the innovative CMOSens® Technology, which integrates the high-precision sensor element and the analog and digital processing electronics on a single CMOS silicon chip. Combined with high-quality materials, the result is a durably stable, extremely fast and highly precise mass flow meter.

The SFM5400 mass flow meter is the valve-free version of the SFC5400 mass flow controller. The SFC5400 mass flow controller has the same performance characteristics as the mass flow meter and is used in similar applications, and the two products can be ideally combined. You can find further information and detailed specifications about the mass flow controller on the SFC5400 website.

Product impressions

Latest gas flow sensors

Smart sensors for your application

Sensirion’s sensor solutions are used in a wide range of applications and markets. Our reliable environmental and flow sensors improve energy efficiency, increase health and ensure safety and comfort.

This website uses cookies to improve your user experience. By using this site, you consent to the use of cookies. You can find more information in our Privacy Notice.