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High-precision, configurable, fast, multi-gas flow sensor
Specification
Mass flow
Full scale flow rate
0.05, 0.1, 0.2, 0.5, 1, 2, 5, 10, 20, 50 and 100
slm
Accuracy
0.08% FS or 0.8% SP
Maximum operating pressure
10
bar
Calibration
Air, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6 and C4F8
flow
Fluidic connector ports
Swagelock, VCO, VCR, Downmount
Generic
Supply voltage
14 - 26.4
V
Average supply current
50000
uA
Max. supply current
320000
uA
Interfaces
Analog voltage, Analog current, Device net, IO link, RS485
Package size (LxWxH)
101.1 x 24.4 x 91
mm³
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