SFM5330

High-precision, configurable, fast, digital flow sensor for OEM

Specification

Mass flow
Full scale flow rate
1, 2 and 5
slm
Full scale flow rate
50, 100, 200 and 500
sccm
Accuracy
0.2%FS or 2% SP
Maximum operating pressure
10
bar
Calibration
Air, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6 and C4F8
flow
Fluidic connector ports
Downmount
Generic
Supply voltage
14 - 26.4
V
Average supply current
50000
uA
Max. supply current
320000
uA
Interfaces
RS485
Package size (LxWxH)
34 x 25 x 62.2
mm³

Technical downloads

Name
Type
Date
File
Size
Datasheet SFC5300/SFM5300 & SFC5330/SFM5330
Datasheet
08/2021
PDF
1.0 MB
Mounting plate SFX53xx
CAD
07/2022
STEP
196.0 KB
STEP file SFM5300
CAD
07/2022
ZIP
5.4 MB
Software SFC5xxx/SFM5xxx
Viewer software
04/2022
ZIP
1.1 MB
Engineering guide SFC5xxx/SFM5xxx
Application note
08/2022
PDF
994.5 KB
Reference and flow conversions
Application note
09/2021
PDF
293.7 KB
Reference and flow conversions calculator
Application note
10/2021
XLSX
30.3 KB
SHDLC Interface Reference SFM5xxx/SFC5xxx
Application note
02/2022
PDF
665.2 KB
Quick start guide SFC5xxx/SFM5xxx
User guide
09/2021
PDF
669.9 KB
Recalibration tool SFC5xxx/SFM5xxx
User guide
07/2022
PDF
1002.3 KB
Software manual SFC5xxx/SFM5xxx
User guide
03/2022
PDF
1.3 MB
Recalibration tool software SFC5xxx/SFM5xxx
Software
06/2022
MSI
1.7 MB
Software library LabVIEW, C, C# SFC5xxx/SFM5xxx
Software
03/2022
ZIP
1.7 MB
Engineering guide SFM
User guide
01/2021
PDF
592.1 KB
REACH and RoHS declaration SFM/SGM
Certificate
07/2022
PDF
99.6 KB
Gas Flow Sensors brochure
Flyer
08/2021
PDF
1013.9 KB

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