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Versatile mass flow controller, via online distribution, 50sccm
Specification
Mass flow
Full scale flow rate
0.05
slm
Full scale flow rate
50
sccm
Accuracy
0.2% FS, 0.2% m.v.
Maximum operating pressure
10
bar
Calibration
Air, O2, N2, Ar, CO2, He, H2, CH4 and N2O
flow
Fluidic connector ports
Legris
Generic
Supply voltage
14 - 26.4
V
Average supply current
75000
μA
Max. supply current
120000
μA
Interfaces
IO link, ModBus, RS485
Package size (LxWxH)
105 x 38.5 x 90.5
mm³
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