SFC5500-10slm

Versatile mass flow controller, via online distribution, 10 slm

Specification

Mass flow
Full scale flow rate
10
slm
Full scale flow rate
10000
sccm
Accuracy
0.08% FS or 0.8% SP
Maximum operating pressure
5
bar
Calibration
Air, O2, N2, Ar, CO2, He, H2, CH4 and N2O
flow
Fluidic connector ports
Legris
Generic
Supply voltage
14 - 26.4
V
Average supply current
200000
uA
Max. supply current
320000
uA
Interfaces
Device net, RS485
Package size (LxWxH)
115 x 24.6 x 91
mm³

Technical downloads

Name
Type
Date
File
Size
Datasheet SFC5500/SFM5500
Datasheet
09/2022
PDF
1.0 MB
STEP file SFC5500-50sccm/0.5slm/2slm/10slm
CAD
04/2022
STEP
3.4 MB
Software SFC5xxx/SFM5xxx
Viewer software
04/2022
ZIP
1.1 MB
Compatible fittings SFC5500/SFM5500
Application note
10/2022
PDF
193.4 KB
Engineering guide SFC5xxx/SFM5xxx
Application note
08/2022
PDF
994.5 KB
Mean time between failures analysis
Application note
08/2022
PDF
202.9 KB
Reference and flow conversions
Application note
09/2021
PDF
293.7 KB
Selection guide mass flow controllers
Application note
07/2022
PDF
255.6 KB
SHDLC Interface Reference SFM5xxx/SFC5xxx
Application note
02/2022
PDF
665.2 KB
Quick start guide SFC5xxx/SFM5xxx
User guide
09/2021
PDF
669.9 KB
Recalibration tool SFC5xxx/SFM5xxx
User guide
07/2022
PDF
1002.3 KB
Software manual SFC5xxx/SFM5xxx
User guide
03/2022
PDF
1.3 MB
Recalibration tool software SFC5xxx/SFM5xxx
Software
06/2022
MSI
1.7 MB
Software library LabVIEW, C, C# SFC5xxx/SFM5xxx
Software
03/2022
ZIP
1.7 MB
Product brochure SFC
Flyer
10/2017
PDF
2.2 MB
Product flyer SFC PV applications
Flyer
02/2013
PDF
543.4 KB
REACH and RoHS declaration SFC
Certificate
07/2022
PDF
95.0 KB

Buy the following product to evaluate this sensor

SFC5500 mass flow controller series represent the culmination of Sensirion’s excellent 20-year track record in precision control of gas flow. The sensor is based on the microthermal measurement principle and makes use of Sensirion’s proven CMOSens® MEMS Technology. This allowed us to build a radical mass flow controller with best-in-class performance and excellent reliability, which unlike most other devices on the market, does not drift and does not require in-service re-calibration.

Thanks to the exceptionally high control range enabled by the CMOSens® MEMS flow sensor, SFC5500 series can cover multiple flow ranges of a traditional mass flow controller in a single device. Coupled with multi-gas calibration and exchangeable fittings, SFC5500 series are the first mass flow controllers on the market available as standard off-the-shelf products suitable for applications in medical, analytical and industrial sectors. Thanks to this versatility, SFC5500 series are also the first mass flow controllers available via catalogue distribution.

SFC5500 series complements the SFC5xxx family of Sensirion’s best-in-class mass flow Controllers, offering the same top performance as SFC5400 and is thus suited for a broad range of applications where best accuracy, highest speed and widest dynamic range are needed. However, unlike the highly configurable SFC5400 series, SFC5500 series mass flow controllers are available in several standard pre-configured variants. For other gases, flow ranges, fittings and interfaces please check SFC5400, or Sensirion’s most cost-efficient solution for large OEM projects – SFC5300.

If you are looking for a mass flow meter, SFM5500 is a valve-less sister variant of SFC5500 offering the same great performance.

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