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Versatile MFC for OEM projects with high unit quantities
Specification
Mass flow
Full scale flow rate
0.05, 0.1, 0.2, 0.5, 1, 2, 5 and 10 slm
slm
Full scale flow rate
20 and 50 and 100 sccm
sccm
Accuracy
0.08% FS or 0.8% SP
Maximum operating pressure
5
bar
Calibration
Air, H2, O2, He, Ar, CO2 and N2 and O2 flow
flow
Fluidic connector ports
Swagelok, VCR, VCO, W-Seal, Downmount
Generic
Supply voltage
14 - 26
V
Average supply current
50000
uA
Max. supply current
320000
uA
Interfaces
RS485
Package size (LxWxH)
101.1 x 24.4 x 91
mm³
Technical downloads
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