SFC5400

Versatile mass flow controller

Specification

Mass flow
Full scale flow rate
1, 2, 5, 10, 20, 50 and 100
slm
Full scale flow rate
50, 100, 200 and 500
sccm
Accuracy
0.08% FS or 0.8% m.v
Maximum operating pressure
5
bar
Calibration
Air, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6 and C4F8
flow
Fluidic connector ports
Swagelock, VCO, VCR, Downmount
Generic
Supply voltage
14 - 26.4
V
Average supply current
50000
μA
Max. supply current
320000
μA
Interfaces
Analog voltage, Analog current, Device net, IO link, RS485
Package size (LxWxH)
101.1 x 24.4 x 91
mm³

Technical downloads

Name
Type
Date
File
Size
Software SFC5xxx/SFM5xxx
Viewer software
04/2022
ZIP
1.1 MB
SHDLC Interface Reference SFM5xxx/SFC5xxx
Application note
02/2022
PDF
665.2 KB
Quick start guide SFC5xxx/SFM5xxx
User guide
09/2021
PDF
669.9 KB
Sample code LabVIEW C# SFC5xxx/SFM5xxx
Software
03/2022
ZIP
1.7 MB
STEP file SFC5400
CAD
10/2021
ZIP
3.2 MB
Datasheet SFC5400
Datasheet
06/2021
PDF
683.3 KB
Reference and flow conversions
Application note
09/2021
PDF
293.7 KB
Recalibration tool SFC5xxx/SFM5xxx
User guide
06/2022
PDF
1004.9 KB
Software manual SFC5xxx/SFM5xxx
User guide
03/2022
PDF
1.3 MB
Recalibration tool software SFC5xxx/SFM5xxx
Software
06/2022
MSI
1.7 MB
Product brochure SFC
Flyer
10/2017
PDF
2.2 MB
Product flyer SFC PV applications
Flyer
02/2013
PDF
543.4 KB
REACH and RoHS declaration SFC
Certificate
07/2021
PDF
94.9 KB

Buy the following product to evaluate this sensor

The SFC5400 mass flow controller measures and controls mass flows with outstanding accuracy, long-term stability and repeatability and covers an impressively wide dynamic measurement range. The SFC5400 highly configurable and its body housing is made of metal. Furthermore, the flow controller is available with various interfaces and a variety of fluidic connections and measures maximum flow rates from 50 sccm up to 200 slm. The sensor signal is directly converted into a digital, completely calibrated and temperature-compensated signal on the chip. Multiple gas calibrations can be stored on a single device. Additionally, the flow controller can check whether the activated gas calibration matches the actual gas present. The versatility of the SFC5400 makes it the ideal solution for industrial and medical applications.

The SFC5400 mass flow controller is, as all sensor products, based on the innovative CMOSens® Technology, which integrates the high-precision sensor element and the analog and digital processing electronics on a single CMOS silicon chip and guarantees an outstanding performance. Combined with high-quality materials, the result is a durably stable, extremely fast and highly precise mass flow controller.

The SFC5400 mass flow controller is available as valve-free version too. The SFM5400 mass flow meter has the same performance characteristics as the mass flow controller and is used in similar applications, and the two products can be ideally combined. You can find further information and detailed specifications about the mass flow controller on the SFM5400 website.

For customer projects with high unit quantities, we adapt or develop your mass flow controller according to your specific requirements.

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