Specification

Mass flow
Full scale flow rate
1, 2, 5, 10, 20, 50 and 100
1, 2, 5, 10, 20, 50 and 100 slm
Full scale flow rate
50, 100, 200 and 500
50, 100, 200 and 500 sccm
Accuracy
0.08% FS or 0.8% SP
0.08% FS or 0.8% SP
Maximum operating pressure
5
5 bar
Calibration
Air, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6 and C4F8
Air, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6 and C4F8 flow
Fluidic connector ports
Swagelock, VCO, VCR, Downmount
Swagelock, VCO, VCR, Downmount
Generic
Supply voltage
14 - 26.4
14 - 26.4 V
Average supply current
50000
50000 uA
Max. supply current
320000
320000 uA
Interfaces
Analog voltage, Analog current, Device net, IO link, RS485
Analog voltage,Analog current,Device net,IO link,RS485
Size (LxWxH)
101.1 x 24.4 x 91
101.1 x 24.4 x 91 mm³

Technical downloads

Name Type Date File Size
Datasheet SFC5400/SFM5400

05/2023

File

798.8 KB

Datasheet 05/2023 PDF 798.8 KB
SFC5xxx DeviceNet communication interface reference

03/2023

File

796.4 KB

User guide 03/2023 PDF 796.4 KB
STEP file SFC5400

10/2021

File

3.2 MB

CAD 10/2021 ZIP 3.2 MB
Software SFC5xxx/SFM5xxx

04/2022

File

1.1 MB

Viewer software 04/2022 ZIP 1.1 MB
Engineering guide SFC5xxx/SFM5xxx

07/2023

File

869.9 KB

Application note 07/2023 PDF 869.9 KB
Mean time between failures analysis

08/2022

File

202.9 KB

Application note 08/2022 PDF 202.9 KB
Reference and flow conversions

09/2021

File

293.7 KB

Application note 09/2021 PDF 293.7 KB
Selection guide mass flow controllers

11/2023

File

347.8 KB

Application note 11/2023 PDF 347.8 KB
SHDLC Interface Reference SFM5xxx/SFC5xxx

02/2022

File

665.2 KB

Application note 02/2022 PDF 665.2 KB
Quick start guide SFC5xxx/SFM5xxx

09/2021

File

369.3 KB

User guide 09/2021 PDF 369.3 KB
Recalibration tool SFC5xxx/SFM5xxx

07/2022

File

1002.3 KB

User guide 07/2022 PDF 1002.3 KB
Software manual SFC5xxx/SFM5xxx

03/2022

File

1.3 MB

User guide 03/2022 PDF 1.3 MB
Python driver SFC5xxx/SFM5xxx

03/2022

Link

-

Software 03/2022 Link -
Recalibration tool software SFC5xxx/SFM5xxx

06/2022

File

-

Software 06/2022 File -
Software library LabVIEW, C, C# SFC5xxx/SFM5xxx

03/2022

File

1.7 MB

Software 03/2022 ZIP 1.7 MB
Mounting Plate SFX54xx

07/2022

File

168.2 KB

CAD 07/2022 STEP 168.2 KB
REACH and RoHS declaration SFC

02/2024

File

84.6 KB

Certificate 02/2024 PDF 84.6 KB
Mass flow controllers brochure

11/2023

File

868.7 KB

Flyer 11/2023 PDF 868.7 KB

Sensor evaluation

Buy the following products to evaluate this sensor

Name Description Series Category
EK-F5x
Evaluation kit for Evaluation kit EK-F5x for SFC5xxx, SFM5xxx, SFC6xxx and ... EK-F5x Mass flow controllers

Download the respective viewer software to start measuring

Go to download center

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