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Versatile mass flow controller
Specification
Mass flow
Full scale flow rate
1, 2, 5, 10, 20, 50 and 100
slm
Full scale flow rate
50, 100, 200 and 500
sccm
Accuracy
0.08% FS or 0.8% m.v
Maximum operating pressure
5
bar
Calibration
Air, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6 and C4F8
flow
Fluidic connector ports
Swagelock, VCO, VCR, Downmount
Generic
Supply voltage
14 - 26.4
V
Average supply current
50000
μA
Max. supply current
320000
μA
Interfaces
Analog voltage, Analog current, Device net, IO link, RS485
Package size (LxWxH)
101.1 x 24.4 x 91
mm³
Technical downloads
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