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Small MFC for cost-sensitive OEM projects with high unit quantities
Specification
Mass flow
Full scale flow rate
1, 2 and 5
slm
Full scale flow rate
50, 100, 200 and 500
sccm
Accuracy
0.2%FS or 2% SP
Maximum operating pressure
10
bar
Calibration
Air, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6 and C4F8
flow
Fluidic connector ports
Downmount
Generic
Supply voltage
14 - 26.4
V
Average supply current
50000
uA
Max. supply current
320000
uA
Interfaces
RS485
Package size (LxWxH)
34 x 25 x 62.2
mm³
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