SFC5330

Small MFC for cost-sensitive OEM projects with high unit quantities

Specification

Mass flow
Full scale flow rate
1, 2 and 5
slm
Full scale flow rate
50, 100, 200 and 500
sccm
Accuracy
0.2%FS or 2% m.v.
Maximum operating pressure
10
bar
Calibration
Air, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6 and C4F8
flow
Fluidic connector ports
Downmount
Generic
Supply voltage
14 - 26.4
V
Average supply current
50000
μA
Max. supply current
320000
μA
Interfaces
RS485
Package size (LxWxH)
34 x 25 x 62.2
mm³

Technical downloads

Name
Type
Date
File
Size
Software SFC5xxx/SFM5xxx
Viewer software
04/2022
ZIP
1.1 MB
Datasheet SFC5300
Datasheet
08/2021
PDF
1.0 MB
Reference and flow conversions
Application note
09/2021
PDF
293.7 KB
SHDLC Interface Reference SFM5xxx/SFC5xxx
Application note
02/2022
PDF
665.2 KB
Quick start guide SFC5xxx/SFM5xxx
User guide
09/2021
PDF
669.9 KB
Software manual SFC5xxx/SFM5xxx
User guide
03/2022
PDF
1.3 MB
STEP file SFC5300
CAD
10/2021
ZIP
4.7 MB
Product brochure SFC
Flyer
10/2017
PDF
2.2 MB
REACH and RoHS declaration SFC
Certificate
07/2021
PDF
94.9 KB

Buy the following product to evaluate this sensor

The SFC5330 mass flow controller measures and monitors mass flows with outstanding accuracy, long-term stability and repeatability. It features an impressively compact size and a broad dynamic measurement range. The SFC5330’s housing is made of metal. The SFC5330 mass flow controller is available with downmount connections and two digital interfaces. The SFC5330 is the smaller variant of the SFC5300 mass flow controller, and is suitable for cost-sensitive OEM projects with high unit quantities.

As with all Sensirion sensors, the SFC5330 mass flow meter’s outstanding performance is based on our innovative CMOSens® Technology, which integrates high-precision sensor technology and processing electronics onto a single CMOS silicon chip. Combined with high-quality materials, the result is the reliably stable, extremely fast and highly precise SFC5330 mass flow controller. The SFC5330 mass flow controller is also available in a valve-free version. The two sensor products have the same performance characteristics, and are used in similar applications, meaning they make for a perfect combination.

For customer projects with high unit quantities, we adapt or develop your mass flow controller according to your specific requirements.

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