SFC5300

MFC for cost-sensitive OEM projects with high unit quantities

Specification

Mass flow
Full scale flow rate
1, 2, 5 and 10
slm
Full scale flow rate
50, 100, 200 and 500
sccm
Accuracy
0.2%FS or 2% SP
Maximum operating pressure
10
bar
Calibration
Air, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6 and C4F8
flow
Fluidic connector ports
Downmount
Generic
Supply voltage
14 - 26.4
V
Average supply current
50000
uA
Max. supply current
320000
uA
Interfaces
RS485
Package size (LxWxH)
48 x 25 x 79.5
mm³

Technical downloads

Name
Type
Date
File
Size
Software SFC5xxx/SFM5xxx
Viewer software
04/2022
ZIP
1.1 MB
Datasheet SFC5300/SFM5300 & SFC5330/SFM5330
Datasheet
08/2021
PDF
1.0 MB
Engineering guide SFC5xxx/SFM5xxx
Application note
08/2022
PDF
994.5 KB
Mean time between failures analysis
Application note
08/2022
PDF
202.9 KB
Reference and flow conversions
Application note
09/2021
PDF
293.7 KB
Selection guide mass flow controllers
Application note
07/2022
PDF
255.6 KB
SHDLC Interface Reference SFM5xxx/SFC5xxx
Application note
02/2022
PDF
665.2 KB
Quick start guide SFC5xxx/SFM5xxx
User guide
09/2021
PDF
669.9 KB
Recalibration tool SFC5xxx/SFM5xxx
User guide
07/2022
PDF
1002.3 KB
Software manual SFC5xxx/SFM5xxx
User guide
03/2022
PDF
1.3 MB
Recalibration tool software SFC5xxx/SFM5xxx
Software
06/2022
MSI
1.7 MB
Software library LabVIEW, C, C# SFC5xxx/SFM5xxx
Software
03/2022
ZIP
1.7 MB
Mounting plate SFX53xx
CAD
07/2022
STEP
196.0 KB
STEP file SFC5300
CAD
10/2021
ZIP
4.7 MB
Product brochure SFC
Flyer
10/2017
PDF
2.2 MB
Product flyer SFC PV applications
Flyer
02/2013
PDF
543.4 KB
REACH and RoHS declaration SFC
Certificate
07/2022
PDF
95.0 KB

Buy the following product to evaluate this sensor

The SFC5300 mass flow controller measures and control mass flows with outstanding accuracy, long-term stability and repeatability. It boasts a compact size and an impressive dynamic measurement range. The body housing of the SFC5300 is metal. The SFC5300 mass flow controller is available with downmount connections and two digital interfaces. The SFC5300 is the smaller variant of the SFC5400 mass flow controller and is for cost-sensitive OEM projects with high unit quantities.

As all Sensirion sensors, the outstanding performance of the SFC5300 mass flow meter is based on the innovative CMOSens® Technology, which integrates the high-precision sensor technology and the processing electronics on a single CMOS silicon chip. Combined with high-quality materials, the result is the durably stable, extremely fast and highly precise SFC5300 mass flow controller.

The SFC5300 mass flow controller is available as valve-free version too. The two sensor products have the same performance characteristics and are used in similar applications, meaning they can be ideally combined. You can find further information and detailed specifications about the mass flow meter on the SFM5300 website.

For customer projects with high unit quantities, we adapt or develop your mass flow controller according to your specific requirements.

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