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Predecessor of the SFC5400 mass flow controller
Specification
Mass flow
Full scale flow rate
1, 2, 5 and 10
slm
Accuracy
0.2%FS or 2% SP
Maximum operating pressure
10
bar
Calibration
Air, O2, N2, Ar and CO2
flow
Fluidic connector ports
Swagelock, VCO, VCR, Downmount
Generic
Supply voltage
14 - 26.4
V
Average supply current
50000
μA
Max. supply current
320000
μA
Interfaces
Analog voltage
Package size (LxWxH)
105 x 38.5 x 90.5
mm³
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