Specification

Mass flow
Full scale flow rate
1, 2, 5 and 10
slm
Accuracy
0.2%FS or 2% SP
Maximum operating pressure
10
bar
Calibration
Air, O2, N2, Ar and CO2
flow
Fluidic connector ports
Swagelock, VCO, VCR, Downmount
Generic
Supply voltage
14 - 26.4
V
Average supply current
50000
μA
Max. supply current
320000
μA
Interfaces
Analog voltage
Package size (LxWxH)
105 x 38.5 x 90.5
mm³

Technical downloads

Name
Type
Date
File
Size
Datasheet SFC4000 (end of life)
Datasheet
01/2012
PDF
431.2 KB
Selection guide mass flow controllers
Application note
07/2022
PDF
255.6 KB
Product brochure SFC
Flyer
10/2017
PDF
2.2 MB
Product flyer SFC PV applications
Flyer
02/2013
PDF
543.4 KB
REACH and RoHS declaration SFC
Certificate
07/2022
PDF
95.0 KB

Sensirion's mass flow controller SFC4000 offers fast response times and accurate control of gas flows over a wide range.

Based on the CMOSens® Technology the digital calibrated and temperature compensated sensor signal is converted directly into a signal which is used in the analog controlling circuit to control the valve. Thanks to this principle the mass flow controller is insusceptible to electromagnetic interferences. The SFC4000 offers an analog interface (0 - 5 V) and provides stable and precise control of gas flows. Required power supply is unipolar 14 to 24 VDC.

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