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Predecessor of the SFC5300 mass flow controller
Specification
Mass flow
Accuracy
±0.2sccm ± 2% SP
Maximum operating pressure
5
bar
Calibration
Air, He, H2 and Ar
flow
Fluidic connector ports
Downmount
Generic
Supply voltage
14.25 - 15.25
V
Max. supply current
330000
uA
Interfaces
RS485
Package size (LxWxH)
70 x 25 x 73
mm³
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