Specification

Mass flow
Accuracy
±0.2sccm ± 2% SP
Maximum operating pressure
5
bar
Calibration
Air, He, H2 and Ar
flow
Fluidic connector ports
Downmount
Generic
Supply voltage
14.25 - 15.25
V
Max. supply current
330000
μA
Interfaces
RS485
Package size (LxWxH)
70 x 25 x 73
mm³

Technical downloads

Name
Type
Date
File
Size
Datasheet SFC3000
Datasheet
11/2008
PDF
152.8 KB
Selection guide mass flow controllers
Application note
07/2022
PDF
255.6 KB
Product brochure SFC
Flyer
10/2017
PDF
2.2 MB
Product flyer SFC PV applications
Flyer
02/2013
PDF
543.4 KB
REACH and RoHS declaration SFC
Certificate
07/2022
PDF
95.0 KB

The mass flow controller SFC3000 offers fast and accurate control of gas flows over a wide range. Its high accuracy and fast settling time is mainly based on the innovative CMOSens® Technology. Thereby the digitally calibrated and temperature compensated sensor signal is converted directly into a signal which is used in the digital controlling circuit to control the valve.

The SFC3000 is a small, fully digital mass flow controller for high-volume OEM applications. Its excellent stability and repeatability make it ideal for analytical instruments. Different gas types and control ranges can be calibrated and switched by software.

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