The implementation of Sensirion mass flow controllers in surface coating and treatment processes ensures high surface quality at high process speeds.

Discover how Sensirion contributes to the solution.

Leading suppliers in the field of semiconductor processing using DRIE have for years relied on Sensirion’s fast, highly accurate and reliable mass flow controllers.

Martin Wirz, Director Sales, Sensirion

SFC5500

New

Versatile mass flow controller, via online distribution

Excellent accuracy and repeatability, multi-gas calibrated
50sccm-200slm full scale flows, exchangeable fluidic connectors
Wide control range, ultra-fast settling time, digital output

5

Products

SFC5400

High performance and versatile mass flow controller

Excellent accuracy and repeatability, wide control range
50sccm-100slm full scale flows and ultra-fast settling time
Different gas calibrations and fluidic connectors configurable

Sites & Languages

Fast control speed for wide dynamic range

Modern semiconductor processing techniques such as vacuum deposition and DRIE (deep reactive ion etching) require fast control of various gases.

Clean processing

High process speed

Long-term stability

The implementation of Sensirion mass flow controllers in surface coating and treatment processes ensures high surface quality at high process speeds.

Discover how Sensirion contributes to the solution.

Fast mass flow controller

Optimizing smart manufacturing processes with continuous flow measurements of gases and liquids

Related sensors

SFC5500

Versatile mass flow controller, via online distribution

SFC5400

High performance and versatile mass flow controller

Applied sensing solutions

Precise dosing when applying photoresist

Drive and control solutions for airflow control

Hydrogen-compatible gas chromatograph