Fast control speed for wide dynamic range

Modern semiconductor processing techniques such as vacuum deposition and DRIE (deep reactive ion etching) require fast control of various gases.

The implementation of Sensirion mass flow controllers in surface coating and treatment processes ensures high surface quality at high process speeds.

Discover how Sensirion contributes to the solution.

Fast mass flow controller

Leading suppliers in the field of semiconductor processing using DRIE have for years relied on Sensirion’s fast, highly accurate and reliable mass flow controllers.

Optimizing smart manufacturing processes with continuous flow measurements of gases and liquids

Martin Wirz, Director Sales, Sensirion

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