Precise dosing when applying photoresist

In the semiconductor industry, the precise application of photoresist to the wafer is essential. Insufficient dosing leads to yield loss, while excess is very expensive.

Discover how Sensirion contributes to the solution.

Used in leading facilities

Leading semiconductor companies worldwide rely on our liquid flow sensors for photoresist dosing and monitoring in their spin coating facilities.

Optimizing smart manufacturing processes with continuous flow measurements of gases and liquids

Martin Wirz, Director Sales, Sensirion

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