Photoresist dosing

Precise dosing when applying photoresist

Precise dosing

Sensirion liquid flow sensors can measure tiny currents of photoresists. This enables precise dosing of photoresist material in the manufacture of semiconductors.

Continuous monitoring

Real-time measurement enables continuous monitoring of the manufacturing process. Changes in the quality of the process are reliably detected and manufacturing errors can be prevented by early intervention.

Made for Semicon

The sensors are suitable for semiconductor applications and meet all requirements for compatibility, quality and reliability.

Discover how Sensirion contributes to the solution

Used in leading facilities

Leading semiconductor companies worldwide rely on our liquid flow sensors for photoresist dosing and monitoring in their spin coating facilities.

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