In the semiconductor industry, the precise application of photoresist to the wafer is essential. Insufficient dosing leads to yield loss, while excess is very expensive.
Precise dosing
Sensirion liquid flow sensors can measure tiny currents of photoresists. This enables precise dosing of photoresist material in the manufacture of semiconductors.
Continuous monitoring
Real-time measurement enables continuous monitoring of the manufacturing process. Changes in the quality of the process are reliably detected and manufacturing errors can be prevented by early intervention.
Made for Semicon
The sensors are suitable for semiconductor applications and meet all requirements for compatibility, quality and reliability.
Discover how Sensirion contributes to the solution.
Used in leading facilities
Leading semiconductor companies worldwide rely on our liquid flow sensors for photoresist dosing and monitoring in their spin coating facilities.
Optimizing smart manufacturing processes with continuous flow measurements of gases and liquids