07/11/2022, News

High purity liquid flow sensor available from distributors now

High purity liquid flow sensor for hydrocarbons at up to 2 ml/s.

Designed to be integrated within demanding coating systems, the SLQ-QT105 flow sensor is a semiconductor-grade-sensor solution for liquid flow rates of up to 120 ml/min of hydrocarbon-based liquids like photoresists and solvents.  

Based on Sensirion’s proven thermal microsensor technology, it breaks new ground when it comes to crucial metrics such as sensitivity, reliability and speed. The short response time of the SLQ-QT105 enables accurate monitoring of highly dynamic processes such as fast dosing operations. Equipped with fittings for 4 x 3 mm PFA tubing, this reliable device works without any moving parts, and can non-invasively measure through the wall of a straight flow path. A smart digital interface and robust RS485 communication are offered for long distance and bus capability.  

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