Thermal-mass measurement principle: The best choice for hydrogen-ready gas meters

Figure 1a: MEMS-based calorimetric sensor element
Figure 1b
Figure 1c
Figure 2a: View inside the gas meter prototype housing with the flow sensor
Figure 2b: Schematic diagram of the measurement setup
Table 1: Composition of test gases
Figure 3: Relative measurement error at the reference gas flow for five flow sensors
Figure 4a: Relative measurement error at the reference gas flow for five flow sensors in 100% H₂
Figure 4b: Relative measurement error at the reference gas flow for five flow sensors in 98% H₂ + 2% CO₂

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