SLQ-QT105

High purity liquid flow sensor for hydrocarbons at up to 2 ml/s

Specification

Liquid flow
Full scale flow rate (IPA)
120000
ul/min
Accuracy (IPA)
10
%
Repeatability (IPA)
2
%
Maximum operating pressure
12
bar
Fluidic connector ports
Super 300 type pillar fitting 4x3
Generic
Supply voltage
4.5 - 5.5
V
Average supply current
20000
uA
Max. supply current
100000
uA
Interfaces
Analog voltage, Analog current, I²C, RS485
Package size (LxWxH)
65 x 33.5 x 20
mm³

Technical downloads

Name
Type
Date
File
Size
Datasheet SLQ-QT105
Datasheet
02/2022
PDF
277.1 KB
Datasheet sensor cable SCC1-Analog
Datasheet
10/2017
PDF
616.1 KB
Datasheet sensor cable SCC1-Current
Datasheet
10/2017
PDF
581.4 KB
Operating guidelines liquid flow meter kits (SLx and LPG10)
Application note
09/2020
PDF
671.7 KB
SCC1-Analog configurator
Software
10/2021
MSI
3.6 MB
Calibration certification SLQ-QTxx
Certificate
09/2018
PDF
87.8 KB
Table overview SLx
Flyer
04/2019
PDF
182.6 KB
Viewer software USB/RS485 (V. 2.91)
Viewer software
10/2021
MSI
1.7 MB
Datasheet SCC1-USB, SCC1-RS485 sensor cable
Datasheet
06/2018
PDF
229.4 KB
Analog cable configurator
Application note
04/2017
PDF
274.2 KB
Chemical resistance
Application note
07/2020
PDF
134.7 KB
Cleaning and clean handling
Application note
06/2019
PDF
159.4 KB
Formation, prevention and removal of biofilms
Application note
07/2020
PDF
294.8 KB
Getting started guide liquid flow
Application note
10/2021
PDF
173.9 KB
Pulsation damping kit
Application note
01/2020
PDF
457.8 KB
Selection guide liquid flow sensors
Application note
08/2020
PDF
281.9 KB
Sensor fluidic ports and tubing connections
Application note
08/2020
PDF
657.4 KB
Toolbox overview liquid flow
Application note
10/2021
PDF
97.0 KB
Quick start guide liquid flow meter kit
User guide
07/2018
PDF
444.3 KB
Quick start guide pulsation damping kit
User guide
01/2003
PDF
86.9 KB
SCC1-RS485 configurator (V. 1.8)
Software
10/2021
MSI
2.2 MB
SCC1-RS485 sensor cable DLL
Software
07/2022
ZIP
1.1 MB
REACH and RoHS declaration SLF
Certificate
07/2022
PDF
98.1 KB
Product brochure LF
Flyer
07/2021
PDF
2.5 MB

Tailored to the integration in demanding coating systems, the SLQ-QT105 is a semicon grade-sensor solution for flow rates of up to 120 ml/min of hydrocarbon based liquids like photoresists and solvents.

Based on Sensirion's proven thermal microsensor technology, it opens new perspectives in terms of sensitivity, reliability and speed. The short response time of the SLQ-QT105 allows the accurate monitoring of highly dynamic processes such as fast dosing operations. Equipped with fittings for 4x3mm PFA tubing, this reliable device works without any moving parts measuring non-invasively through the wall of a straight flow path. A smart digital interface and robust RS485 communication is offered for long distance and bus capability.

For water-based liquids or highly viscous fluids with flow rates of up to 120 ml/min, please see our liquid flow meter SLQ-QT500.

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