SFM5500-10slm

New

High-pressure mass flow meter for multiple gases, 10 slm

Specification

Mass flow
Full scale flow rate
10
slm
Full scale flow rate
10000
sccm
Accuracy
0.08% FS or 0.8% m.v
Maximum operating pressure
10
bar
Calibration
Air, O2, N2, Ar, CO2, He, H2, CH4 and N2O
flow
Fluidic connector ports
Legris
Generic
Supply voltage
14 - 26.4
V
Average supply current
35000
μA
Max. supply current
50000
μA
Interfaces
IO link, ModBus, RS232
Package size (LxWxH)
105 x 38.5 x 90.5
mm³

Technical downloads

Name
Type
Date
File
Size
Datasheet SFC5500 / SFM5500
Datasheet
04/2022
PDF
1.2 MB
Reference and flow conversions
Application note
09/2021
PDF
293.7 KB
Reference and flow conversions calculator
Application note
10/2021
XLSX
30.3 KB
Recalibration tool SFC5xxx/SFM5xxx
User guide
06/2022
PDF
1004.9 KB
Recalibration tool software SFC5xxx/SFM5xxx
Software
06/2022
MSI
1.7 MB
Engineering guide SFM
User guide
01/2021
PDF
592.1 KB
REACH and RoHS declaration SFM/SGM
Certificate
09/2021
PDF
99.4 KB
Product flyer SFM
Flyer
08/2021
PDF
1013.9 KB

SFM5500 mass flow meter series represent the culmination of Sensirion’s excellent 20-year track record in measuring gas flow. The device is based on the microthermal measurement principle and makes use of Sensirion’s proven CMOSens® MEMS Technology. This allowed us to build a radical mass flow meter with best-in-class performance and excellent reliability, which unlike most other devices on the market, does not drift and does not require in-service re-calibration.

Thanks to the exceptionally high measurement range enabled by the CMOSens® MEMS flow sensor, SFM5500 series can cover multiple flow ranges of a traditional mass flow meter in a single device. They are available in metal packaging, which additionally allows for high pressure resistance. Finally, unlike most devices on the market, SFM5500 are suitable for low and ultra-low (down to 50 sccm full scale flow), as well as high gas flows. Coupled with multi-gas calibration and exchangeable fittings, SFM5500 series are the first of a kind mass flow meters on the market available as standard off-the-shelf products suitable for applications in medical, analytical and industrial sectors. Thanks to this versatility, SFM5500 series are also the first mass flow meters in its category available via catalogue distribution.

SFM5500 series complements the SFM5xxx family of Sensirion’s best-in-class mass flow meters, offering the same top performance as SFM5400 and is thus suited for a broad range of applications where best accuracy, highest speed and widest dynamic range are needed. However, unlike the highly configurable SFM5400 series, SFM5500 series mass flow meters are available in several standard pre-configured variants. For other gases, flow ranges, fittings and interfaces please check SFM5400, or Sensirion’s most cost-efficient solution for large OEM projects – SFM5300.

If you are looking for a mass flow controller, SFC5500 is a sister variant of SFM5500 featuring a valve. It offers the same great performance.

Latest gas flow sensors

Smart sensors for your application

Sensirion’s sensor solutions are used in a wide range of applications and markets. Our reliable environmental and flow sensors improve energy efficiency, increase health and ensure safety and comfort.