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Compact liquid flow sensor for OEM applications up to 80 µl/min
Specification
Liquid flow
Full scale flow rate
(H2O)
80
ul/min
Accuracy
(H2O)
5
%
Repeatability
(H2O)
0.5
%
Full scale flow rate
(IPA)
500
ul/min
Accuracy
(IPA)
20
%
Repeatability
(IPA)
1
%
Maximum operating pressure
100
bar
Fluidic connector ports
UNF 6-40
Generic
Supply voltage
4 - 12
V
Average supply current
6.8
uA
Max. supply current
6.8
uA
Interfaces
Analog voltage, Analog current, I²C, RS485
Package size (LxWxH)
53 x 22 x 9
mm³
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