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Compact liquid flow sensor for OEM applications up to 1.5 µl/min
Specification
Liquid flow
Full scale flow rate
(H2O)
1.5
ul/min
Accuracy
(H2O)
10
%
Repeatability
(H2O)
1
%
Maximum operating pressure
200
bar
Fluidic connector ports
UNF 6-40
Generic
Supply voltage
4 - 12
V
Average supply current
68000
uA
Max. supply current
68000
uA
Interfaces
Analog voltage, Analog current, I²C, RS485
Package size (LxWxH)
53 x 22 x 9
mm³
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