Pressure range
±500
Pa
Package size (LxWxH)
3 x 3.5 x 2.1
mm³
Sites & Languages
Product catalog
Package size (LxWxH)
74 x 40 x 20
mm³
Package size (LxWxH)
74 x 40 x 20
mm³
Package size (LxWxH)
74 x 40 x 20
mm³
Package size (LxWxH)
74 x 21 x 20
mm³
Full scale flow rate
5
slm
Accuracy
0.2% FS or 2% SP
Full scale flow rate
5000
sccm
Package size (LxWxH)
102 x 45 x 20
mm³
Full scale flow rate
50
slm
Accuracy
0.2% FS or 2% SP
Full scale flow rate
50000
sccm
Package size (LxWxH)
102 x 45 x 20
mm³
Full scale flow rate
20
slm
Accuracy
0.2% FS or 2% SP
Full scale flow rate
20000
sccm
Package size (LxWxH)
102 x 45 x 20
mm³
Full scale flow rate
0.5, 1, 2, 5, 10, 20 and 50
slm
Accuracy
0.2% FS or 2% SP
Full scale flow rate
50, 100, 200 and 500
sccm
Package size (LxWxH)
102 x 45 x 20
mm³
Flow range
G1.6/G2.5/G4/G6/G10/G16/G25
Meter class
1.5
Package size (LxWxH)
76.7 x 44.6 x 40
mm³
Package size (LxWxH)
54 x 40 x 65
mm³