Applications

Sensirion sensor solutions enable extremely precise and reliable manufacturing processes in the modern semiconductor industry. This improves yields and greatly reduces excess, waste and costs.

Semiconductor

Photoresist dosing: Precise dosing when applying photoresist

In the semiconductor industry, the precise application of photoresist to the wafer is essential. Insufficient dosing leads to yield loss, while excess is very expensive.
Semiconductor

Surface coating/treatment: Fast control speed for wide dynamic range

Modern semiconductor processing techniques such as vacuum deposition and DRIE (deep reactive ion etching) require fast control of various gases. Our mass flow controllers allow very fast control or switching between process gases, enabling high speed with high quality.

Our expertise

DRIE

Leading suppliers in the field of semiconductor processing using DRIE have for years relied on Sensirion’s mass flow controllers.

Global

Leading semiconductor companies worldwide rely on our liquid flow sensors for photoresist dosing.