Mass flow controllers with the highest accuracy and long-term stability for a large dynamic range of measurements.


Whatever you need a mass flow controller for, whether for devices, machines or processes: thanks to many years of experience in industrial automation and medical technology, Sensirion can provide you with the best possible support.


The calorimetric flow measurement sensors are microelectromechanical systems (MEMS). The integrated valve makes it possible to regulate flow rates accurately and very quickly.

CMOSens® Technology

Start testing today: Sensirion's plug and play gas flow control evaluation kits.