- Excellent accuracy and repeatability, multi-gas calibrated
- 50sccm-200slm full scale flows, exchangeable fluidic connectors
- Wide control range, ultra-fast settling time, digital output
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Products
Mass flow controllers with the highest accuracy and long-term stability for a large dynamic range of measurements.
Whatever you need a mass flow controller for, whether for devices, machines or processes: thanks to many years of experience in industrial automation and medical technology, Sensirion can provide you with the best possible support.
The calorimetric flow measurement sensors are microelectromechanical systems (MEMS). The integrated valve makes it possible to regulate flow rates accurately and very quickly.
CMOSens® Technology