- Excellent accuracy and repeatability, multi-gas calibrated
- 50sccm-200slm full scale flows, exchangeable fluidic connectors
- Wide control range, ultra-fast settling time, digital output
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Products
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Mass flow controllers
Characteristics
Mass flow controllers with the highest accuracy and long-term stability for a large dynamic range of measurements.
Benefits
Whatever you need a mass flow controller for, whether for devices, machines or processes: thanks to many years of experience in industrial automation and medical technology, Sensirion can provide you with the best possible support.
Technology
The calorimetric flow measurement sensors are microelectromechanical systems (MEMS). The integrated valve makes it possible to regulate flow rates accurately and very quickly.
CMOSens® TechnologyFeatured products
- Compact and lightweight
- Highly integrated with most robust supply chain
- Excellent accuracy and repeatability, wide control range
- 50sccm-100slm full scale flows and ultra-fast settling time
- Different gas calibrations and fluidic connectors configurable
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Products
- High accuracy and repeatability, lightweight and compact
- 50sccm-10slm full scale flows, downmount connectors
- Wide control range, ultra-fast settling time, digital output
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Products