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SFM3200

Flow sensor for inspiratory use in respiratory devices, 250 slm

he SFM3200 mass flow meter is best suitable for inspiratory flow measurements. In addition, an autoclavable / washable version is avaialble (SFM3200-AW), which is able to withstand autoclave procedures, making it reusable and suitable for expiratory flow measurements. The SFM3200 mass flow meter is characterized by its wide dynamic measurement range of up to 250 slm, as well as its measurement accuracy at low flows. The special design of the flow channel results in a very low pressure drop through the flow body of the sensor, which makes it extremely suitable for medical ventilation and other respiratory applications. The thermal sensor element assures very fast signal processing time and bidirectional measurement mode, with the signal being internally linearized and temperature compensated. The outstanding performance of the SFM3200 sensor is based on Sensirion's patented CMOSens® Technology. The technology allows the integration of the sensor element and the analysis electronics on a single, tiny CMOS silicon chip. The result is a highly stable and precise system for demanding and cost-sensitive applications.
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Specification

Gas flow
Full scale flow rate
-100 - 250
-100 - 250slm
Typical accuracy
±2% m.v.
±2% m.v.
Calibration
Air and O₂
Air and O₂
Sensor output
Flow and T
Flow and T
Maximum operating pressure
1.07
1.07bar
Fluidic connector ports
Medical cone (22 mm)
Medical cone (22 mm)
Generic
Supply voltage
4.75 - 5.5
4.75 - 5.5V
Max. supply current
10000
10000uA
Interfaces
I²C
I²C
Size (LxWxH)
73 x 26 x 26.2
73 x 26 x 26.2mm

Downloads

Datasheet SFM3200

05/2022

File

277.2 KB

Datasheet05/2022PDF277.2 KB
Cleaning methods SFM3x00-AW

01/2021

File

188.0 KB

Application note01/2021PDF188.0 KB
CRC checksum

01/2020

File

174.3 KB

Application note01/2020PDF174.3 KB
Selection guide gas flow sensors

06/2025

File

449.9 KB

Application note06/2025PDF449.9 KB
SFM3x00 I²C Functional Description

05/2022

File

306.1 KB

Application note05/2022PDF306.1 KB
Sample code SFM3000

File

261.6 KB

SoftwareZIP261.6 KB
STEP file SFM3200

File

3.4 MB

Drawings/CADSTEP3.4 MB
Handling instructions SFM3xxx

01/2021

File

141.7 KB

Application note01/2021PDF141.7 KB
Reference and flow conversions

09/2021

File

293.7 KB

Application note09/2021PDF293.7 KB
Reference and flow conversions calculator

File

30.3 KB

Application noteXLSX30.3 KB
Engineering guide SFM

01/2021

File

592.1 KB

Guide01/2021PDF592.1 KB
SEK-ControlCenter (all devices)

Link

SoftwareLink
Calibration certification gas flow sensors

01/2023

File

169.8 KB

Certificate01/2023PDF169.8 KB
REACH and RoHS declaration SFM/SGM

01/2025

File

122.8 KB

Certificate01/2025PDF122.8 KB
Gas flow sensors brochure

01/2024

File

497.6 KB

Flyer01/2024PDF497.6 KB

Sensor evaluation

Buy the following products to evaluate this sensor

NameDescriptionSeriesCategory
SEK-SensorBridgeConnecting bridge with two sensor portsSEK-SensorBridge
SEK-SFM3200Gas flow sensors evaluation kit SFM3200SEK-SFMxxxxGas flow sensors

SEK-SensorBridge

Connecting bridge with two sensor ports

SEK-SensorBridge

SEK-SFM3200

Gas flow sensors evaluation kit SFM3200

SEK-SFMxxxx

Gas flow sensors

Download the respective viewer software to start measuring

Go to download center

Start testing our sensors fast and easy with the evaluation kits

How to get started

Smart sensors for your application

Sensirion's sensor solutions are used in a wide range of applications and markets. Our reliable environmental and flow sensors improve energy efficiency, increase health and ensure safety and comfort.

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