Viewer software

Name
Relation
Date
Type
Size
EK-F5x / SFC5300 / SFC5500 / SFM5500 / SFC5400 / SFM5300 / SFM5400
04/2022
ZIP
1.1 MB

Datasheet

Name
Relation
Date
Type
Size
SFC3x00
11/2008
PDF
152.8 KB
SFC4x00
01/2012
PDF
431.2 KB
SFC5300
08/2021
PDF
1.0 MB
SFC5400
06/2021
PDF
683.3 KB
SFC5500 / SFM5500
04/2022
PDF
1.2 MB

Application note

Name
Relation
Date
Type
Size
SFC5500
01/2022
PDF
129.4 KB
SFC5300 / SFC5400 / SFC5500 / SFM3xxx / SFM3xxx-AW/D / SFM4xxx / SFM5xxx
09/2021
PDF
293.7 KB
SFC5300 / SFC5500 / SFM5500 / SFC5400 / SFM5300 / SFM5400
02/2022
PDF
665.2 KB

User guide

Name
Relation
Date
Type
Size
EK-F5x / SFC5300 / SFC5500 / SFM5500 / SFC5400 / SFM5300 / SFM5400
09/2021
PDF
669.9 KB
EK-F5x / SFC5300 / SFC5400 / SFC5500 / SFM5500 / SFC5300 / SFM5300 / SFM5400
03/2022
PDF
1.3 MB

Software

Name
Relation
Date
Type
Size
SFC5400 / SFC5500 / SFM5500 / EK-F5x / SFC5400 / SFM5300 / SFM5400
03/2022
ZIP
1.7 MB

CAD

Name
Relation
Date
Type
Size
SFC5300
10/2021
ZIP
4.7 MB
SFC5400 / SFM5400
10/2021
ZIP
3.2 MB
SFC5500-200slm
02/2022
STEP
3.4 MB
SFC5500-0.5slm / SFC5500-10slm / SFC5500-2slm / SFC5500-50sccm
04/2022
STEP
3.4 MB

Certificate

Name
Relation
Date
Type
Size
Mass flow controllers
07/2021
PDF
94.9 KB

Flyer

Name
Relation
Date
Type
Size
SFC3x00 / SFC4x00 / SFC5300 / SFC5400 / SFC5500
10/2017
PDF
2.2 MB
SFC5300 / SFC5400
02/2013
PDF
543.4 KB