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Technical download
Input:
Mass flow controllers
21 results
Viewer software
Name
Relation
Date
Type
Size
EK-F5x
/
SFC5300
/
SFC5500
/
SFM5500
/
SFC5400
/
SFM5300
/
SFM5400
04/2022
ZIP
1.1 MB
Datasheet
Name
Relation
Date
Type
Size
Application note
Name
Relation
Date
Type
Size
SFC5300
/
SFC5400
/
SFC5500
/
SFM3xxx
/
SFM3xxx-AW/D
/
SFM4xxx
/
SFM5xxx
09/2021
PDF
293.7 KB
SFC5300
/
SFC5500
/
SFM5500
/
SFC5400
/
SFM5300
/
SFM5400
02/2022
PDF
665.2 KB
User guide
Name
Relation
Date
Type
Size
EK-F5x
/
SFC5300
/
SFC5500
/
SFM5500
/
SFC5400
/
SFM5300
/
SFM5400
09/2021
PDF
669.9 KB
EK-F5x
/
SFC5300
/
SFC5400
/
SFC5500
/
SFM5500
/
SFC5300
/
SFM5300
/
SFM5400
03/2022
PDF
1.3 MB
Software
Name
Relation
Date
Type
Size
SFC5300
/
SFC5500
/
SFM5500
/
SFC5400
/
SFM5300
/
SFM5400
03/2022
Link
-
SFC5400
/
SFC5500
/
SFM5500
/
EK-F5x
/
SFC5400
/
SFM5300
/
SFM5400
03/2022
ZIP
1.7 MB
CAD
Name
Relation
Date
Type
Size
SFC5500-0.5slm
/
SFC5500-10slm
/
SFC5500-2slm
/
SFC5500-50sccm
04/2022
STEP
3.4 MB
Certificate
Name
Relation
Date
Type
Size
Flyer
Name
Relation
Date
Type
Size