Technical download

Viewer software

Name
Relation
Date
Type
Size
Software SFC5xxx/SFM5xxx
EK-F5x / SFC5300 / SFC5400 / SFC5500 / SFM5xxx
04/2022
ZIP
1.1 MB

Datasheet

Name
Relation
Date
Type
Size
Datasheet SFC3000
SFC3x00
11/2008
PDF
152.8 KB
Datasheet SFC4000 (end of life)
SFC4x00
01/2012
PDF
431.2 KB
Datasheet SFC5300/SFM5300 & SFC5330/SFM5330
SFC5300 / SFM5300 / SFM5330
08/2021
PDF
1.0 MB
Datasheet SFC5400 / SFM5400
SFC5400 / SFM5400
09/2022
PDF
798.5 KB
Datasheet SFC5460/SFM5460
SFC5460 / SFM5460
09/2022
PDF
771.0 KB
Datasheet SFC5500 / SFM5500
SFC5500 / SFM5xxx / SFC5500-0.5slm / SFC5500-10slm / SFC5500-200slm / SFC5500-2slm / SFC5500-50sccm / SFM5500-0.5slm / SFM5500-10slm / SFM5500-2slm / SFM5500-50sccm
09/2022
PDF
1.0 MB

Application note

Name
Relation
Date
Type
Size
SFC5500 / SFM5xxx / SFC5500-0.5slm / SFC5500-10slm / SFC5500-200slm / SFC5500-2slm / SFC5500-50sccm / SFM5500-0.5slm / SFM5500-10slm / SFM5500-2slm / SFM5500-50sccm
01/2022
-
Engineering guide SFC5xxx/SFM5xxx
SFC5300 / SFC5400 / SFC5500 / SFM5xxx
08/2022
PDF
994.5 KB
Mean time between failures analysis
SFC3x00 / SFC4x00 / SFC5300 / SFC5400 / SFC5500
08/2022
PDF
202.9 KB
Reference and flow conversions
SFC5300 / SFC5400 / SFC5500 / SFM3xxx / SFM3xxx-AW/D / SFM4xxx / SFM5xxx
09/2021
PDF
293.7 KB
Selection guide mass flow controllers
Mass flow controllers / SFC3x00 / SFC4x00 / SFC5300 / SFC5400 / SFC5500
07/2022
PDF
255.6 KB
SHDLC Interface Reference SFM5xxx/SFC5xxx
SFC5300 / SFC5400 / SFC5500 / SFM5xxx
02/2022
PDF
665.2 KB

User guide

Name
Relation
Date
Type
Size
Quick start guide SFC5xxx/SFM5xxx
EK-F5x / SFC5300 / SFC5400 / SFC5500 / SFM5xxx
09/2021
PDF
669.9 KB
Recalibration tool SFC5xxx/SFM5xxx
SFC5300 / SFC5400 / SFC5500 / SFM5xxx
07/2022
PDF
1002.3 KB
Software manual SFC5xxx/SFM5xxx
EK-F5x / SFC5300 / SFC5400 / SFC5500 / SFM5xxx
03/2022
PDF
1.3 MB

Software

Name
Relation
Date
Type
Size
Python driver SFC5xxx/SFM5xxx
SFC5300 / SFC5400 / SFC5500 / SFM5xxx
03/2022
Link
-
Recalibration tool software SFC5xxx/SFM5xxx
SFC5300 / SFC5400 / SFC5500 / SFM5xxx
06/2022
MSI
1.7 MB
Software library LabVIEW, C, C# SFC5xxx/SFM5xxx
SFC5300 / SFC5400 / SFC5500 / SFM5xxx / EK-F5x
03/2022
ZIP
1.7 MB

CAD

Name
Relation
Date
Type
Size
Mounting plate SFX53xx
SFC5300 / SFM5300 / SFM5330
07/2022
STEP
196.0 KB
Mounting Plate SFX54xx
SFC5400 / SFM5400 / SFM5460
07/2022
STEP
168.2 KB
STEP file downmount SFC5460/SFM5460
SFC5460 / SFM5460
08/2022
STEP
25.2 MB
STEP file SFC5300
SFC5300
10/2021
ZIP
4.7 MB
STEP file SFC5400
SFC5400 / SFM5400
10/2021
ZIP
3.2 MB
STEP file SFC5500-200
SFC5500-200slm
02/2022
STEP
3.4 MB
STEP file SFC5500-50sccm/0.5slm/2slm/10slm
SFC5500-0.5slm / SFC5500-10slm / SFC5500-2slm / SFC5500-50sccm
04/2022
STEP
3.4 MB

Certificate

Name
Relation
Date
Type
Size
REACH and RoHS declaration SFC
Mass flow controllers
07/2022
PDF
95.0 KB

Flyer

Name
Relation
Date
Type
Size
Product brochure SFC
SFC3x00 / SFC4x00 / SFC5300 / SFC5400 / SFC5500
10/2017
PDF
2.2 MB
Product flyer SFC PV applications
SFC3x00 / SFC4x00 / SFC5300 / SFC5400 / SFC5500
02/2013
PDF
543.4 KB