Pressure range
±500
Pa
Package size (LxWxH)
3 x 3.5 x 2.1
mm³
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Product catalog
Full scale flow rate
1 - 50
slm
Typical accuracy
2% set point or 0.2% full scale
Full scale flow rate
0.5, 1, 2, 5, 10, 20 and 50
slm
Accuracy
2% set point or 0.2% full scale
Full scale flow rate
500, 1000, 2000, 5000, 10000, 20000 and 50000
sccm
Flow range
G1.6/G2.5/G4/G6/G10/G16/G25
Meter class
1.5
Package size (LxWxH)
76.7 x 44.6 x 40
mm³
Operating relative humidity range
0 - 100
%RH
Typ. relative humidity accuracy
2.5
%RH
Operating temperature range
-40 - 125
°C
Typ. temperature accuracy
0.3
°C
Package size (LxWxH)
1.5 x 1.5 x 0.5
mm³
Operating temperature range
-40 - 125
°C
Typ. temperature accuracy
0.3
°C
Package size (LxWxH)
1.5 x 1.5 x 0.5
mm³
Operating temperature range
-40 - 125
°C
Typ. temperature accuracy
0.3
°C
Package size (LxWxH)
1.5 x 1.5 x 0.5
mm³
Full scale flow rate
(H2O)
600
ml/min
Accuracy
(H2O)
5
%
Full scale flow rate
(IPA)
600
ml/min
Accuracy
(IPA)
10
%
Package size (LxWxH)
48 x 15.5 x 8.6
mm³
Full scale flow rate
0 - 20
slm
Typical accuracy
±2% m.v.
Package size (LxWxH)
92.5 x 32 x 29.3
mm³